JPS6472427A - Manufacture and device of superconducting thin film - Google Patents

Manufacture and device of superconducting thin film

Info

Publication number
JPS6472427A
JPS6472427A JP62230007A JP23000787A JPS6472427A JP S6472427 A JPS6472427 A JP S6472427A JP 62230007 A JP62230007 A JP 62230007A JP 23000787 A JP23000787 A JP 23000787A JP S6472427 A JPS6472427 A JP S6472427A
Authority
JP
Japan
Prior art keywords
thin film
substrate
valve
housing member
superconducting thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62230007A
Other languages
Japanese (ja)
Inventor
Koichi Mizushima
Jiro Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62230007A priority Critical patent/JPS6472427A/en
Publication of JPS6472427A publication Critical patent/JPS6472427A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To form an excellent oxide superconducting thin film with good reproductivity by depositing an extremely thin film of oxide superconducting material, and thermally processing it, and further repeating the above processes. CONSTITUTION:The vessel of vapor deposition device for forming a superconducting thin film is composed of a vapor deposition source housing member 1 and a substrate housing member 2, both of which are connected by a gate valve 3. To a hopper 6 of this housing member 1, a raw powder 5 having oxide powder mixed therein with a specified ratio is supplied to feed it a chute 7 to which oscillation generated by a vibrator 8 are given. This time, the valve 3 is opened by means of a valve control circuit 14, and valve 12, 13 are closed to set the internal pressure to a specified vacuum level. A substrate 11 is placed from a gate valve 9 on a substrate heater/supporter 10, on which substrate on oxide superconducting thin film with a specified thickness is formed. The substrate 11 is thermally processed at a predetermined tempera ture, then formation of the thin film and the thermal processing are repeated to form excellent thin films with good reproductivity.
JP62230007A 1987-09-14 1987-09-14 Manufacture and device of superconducting thin film Pending JPS6472427A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62230007A JPS6472427A (en) 1987-09-14 1987-09-14 Manufacture and device of superconducting thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62230007A JPS6472427A (en) 1987-09-14 1987-09-14 Manufacture and device of superconducting thin film

Publications (1)

Publication Number Publication Date
JPS6472427A true JPS6472427A (en) 1989-03-17

Family

ID=16901135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62230007A Pending JPS6472427A (en) 1987-09-14 1987-09-14 Manufacture and device of superconducting thin film

Country Status (1)

Country Link
JP (1) JPS6472427A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0398164B1 (en) * 1989-05-19 1993-10-27 Sumitomo Electric Industries, Ltd. Method of fabricating oxide superconducting film
EP0617473B1 (en) * 1993-03-26 1999-01-13 Matsushita Electric Industrial Co., Ltd. Method of fabricating an oxide superconductor
US11591426B2 (en) 2016-03-31 2023-02-28 Toray Industries, Inc. Copolymer, wetting agent, medical device, and method for producing same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0398164B1 (en) * 1989-05-19 1993-10-27 Sumitomo Electric Industries, Ltd. Method of fabricating oxide superconducting film
EP0617473B1 (en) * 1993-03-26 1999-01-13 Matsushita Electric Industrial Co., Ltd. Method of fabricating an oxide superconductor
US11591426B2 (en) 2016-03-31 2023-02-28 Toray Industries, Inc. Copolymer, wetting agent, medical device, and method for producing same

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