JPS6469933A - Method for determining shearing amount of shearing interferometer - Google Patents

Method for determining shearing amount of shearing interferometer

Info

Publication number
JPS6469933A
JPS6469933A JP22773287A JP22773287A JPS6469933A JP S6469933 A JPS6469933 A JP S6469933A JP 22773287 A JP22773287 A JP 22773287A JP 22773287 A JP22773287 A JP 22773287A JP S6469933 A JPS6469933 A JP S6469933A
Authority
JP
Japan
Prior art keywords
shearing
amount
surface shape
interferometer
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22773287A
Other languages
Japanese (ja)
Inventor
Akira Kuroda
Masakazu Matsugi
Minoru Yoshii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP22773287A priority Critical patent/JPS6469933A/en
Publication of JPS6469933A publication Critical patent/JPS6469933A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE:To obtain a hearing amount highly accurately, by measuring the surface shape of a reference material, whose surface shape is known with a shearing interferometer, and using the measured value and the data of the known surface shape. CONSTITUTION:At first, a material to be checked, whose surface is not known, is measured by another method (1), which can measure the surface shape W (3) of the material to be checked, other than a shearing interferometer, in which a shearing amount to be obtained is set. Then, a known surface shape, which has been measured with preset accuracy beforehand, or the known surface shape of a primary standard and the like is measured with the shearing interferometer. Then, the preset shearing amount of the shearing interferometer is obtained from the measured result that is obtained with the shearing interferometer and the known surface-shape data of a body based on the expression of relation. Since the preset shearing amount of the shearing interferometer is introduced by the computation without depending on the actually measured value in an apparatus, the accurate shearing amount can be obtained highly precisely.
JP22773287A 1987-09-11 1987-09-11 Method for determining shearing amount of shearing interferometer Pending JPS6469933A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22773287A JPS6469933A (en) 1987-09-11 1987-09-11 Method for determining shearing amount of shearing interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22773287A JPS6469933A (en) 1987-09-11 1987-09-11 Method for determining shearing amount of shearing interferometer

Publications (1)

Publication Number Publication Date
JPS6469933A true JPS6469933A (en) 1989-03-15

Family

ID=16865494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22773287A Pending JPS6469933A (en) 1987-09-11 1987-09-11 Method for determining shearing amount of shearing interferometer

Country Status (1)

Country Link
JP (1) JPS6469933A (en)

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