JPS6468942A - Mechanism for positioning semiconductor substrate - Google Patents
Mechanism for positioning semiconductor substrateInfo
- Publication number
- JPS6468942A JPS6468942A JP62225913A JP22591387A JPS6468942A JP S6468942 A JPS6468942 A JP S6468942A JP 62225913 A JP62225913 A JP 62225913A JP 22591387 A JP22591387 A JP 22591387A JP S6468942 A JPS6468942 A JP S6468942A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- straight line
- driving means
- rotation driving
- processing system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To obtain a semiconductor substrate without the occurrence of defocusing, by rotating a rotation driving means, which rotates the semiconductor substrate, with a straight line, which is perpendicular to the rotary axis, as the center. CONSTITUTION:A first straight line 7 is included in the main plane of a semiconductor substrate 1. A second straight line 8 is perpendicular to the first straight line. A first rotation driving means 9 rotates the semiconductor 1 with the straight line 7 as the center. A second rotation driving means 10 rotates the rotation driving means 9 as the straight line 8 as the center. A processing system driving shaft 13a drives the substrate 1 in parallel with an axis 5. The atittude of the main plane of the semiconductor substrate 1 is changed with the rotation driving means 9 and the rotation driving means 10. Thus the distances between distance detecting points 14a, 14b and 14c and the processing system are made uniform. Thereafter, the focal point of exposure is aligned with the main plane of the semiconductor substrate 1 with the processing system driving shaft 13a based on any of the distance values between the detecting points 14a, 14b and 14c and the processing system.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62225913A JPS6468942A (en) | 1987-09-09 | 1987-09-09 | Mechanism for positioning semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62225913A JPS6468942A (en) | 1987-09-09 | 1987-09-09 | Mechanism for positioning semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6468942A true JPS6468942A (en) | 1989-03-15 |
Family
ID=16836848
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62225913A Pending JPS6468942A (en) | 1987-09-09 | 1987-09-09 | Mechanism for positioning semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6468942A (en) |
-
1987
- 1987-09-09 JP JP62225913A patent/JPS6468942A/en active Pending
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