JPS646810A - Optical scanning type displacement sensor - Google Patents

Optical scanning type displacement sensor

Info

Publication number
JPS646810A
JPS646810A JP16342787A JP16342787A JPS646810A JP S646810 A JPS646810 A JP S646810A JP 16342787 A JP16342787 A JP 16342787A JP 16342787 A JP16342787 A JP 16342787A JP S646810 A JPS646810 A JP S646810A
Authority
JP
Japan
Prior art keywords
position detecting
detecting sensor
light beam
width
projection system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16342787A
Other languages
Japanese (ja)
Inventor
Motoo Igari
Yuji Takada
Shintaro Yamamoto
Yoshiaki Kanbe
Yoshito Kato
Yasuo Ishiguro
Nobuyuki Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp, Matsushita Electric Works Ltd filed Critical Toyota Motor Corp
Priority to JP16342787A priority Critical patent/JPS646810A/en
Priority to GB8814270A priority patent/GB2206690B/en
Priority to US07/212,228 priority patent/US4864147A/en
Priority to IT8848128A priority patent/IT1219969B/en
Priority to DE3822143A priority patent/DE3822143A1/en
Publication of JPS646810A publication Critical patent/JPS646810A/en
Priority to GB9107670A priority patent/GB2243442B/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To enable a narrow-width position detecting sensor to be used and to improve the utilization efficiency of a light beam by suppressing the movement of a converged spot in the width direction of the position detection sensor. CONSTITUTION:A light beam emitted by a projection system 1 is projected on an object body 2 and its diffuse reflected light is converged by a photodetection optical system 3 which is arranged at a distance from the projection system 1 and photodetected by a linear position detecting sensor 4 arranged on the image formation surface of the photodetection optical system 3. The projection system 1 has a scanning mirror 5 as a deflecting means and the light beam is scanned on the surface of the object 2 as the scanning mirror 5 oscillates. Light projected on the photodetection surface of the position detecting sensor 4 within a range where the light beam is scanned on the surface of the object 2 2 is suppressed to the width of the position detecting sensor 4 in the width direction of the position detecting sensor 4. Consequently, the narrow-width position detecting sensor is usable and the response is speeded up.
JP16342787A 1987-06-30 1987-06-30 Optical scanning type displacement sensor Pending JPS646810A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP16342787A JPS646810A (en) 1987-06-30 1987-06-30 Optical scanning type displacement sensor
GB8814270A GB2206690B (en) 1987-06-30 1988-06-16 Optically scanning displacement sensor
US07/212,228 US4864147A (en) 1987-06-30 1988-06-27 Optically scanning displacement sensor with linearity correction means
IT8848128A IT1219969B (en) 1987-06-30 1988-06-27 OPTICAL SCAN DISPLACEMENT SENSOR, BASED ON TRIANGULATION CALCULATIONS
DE3822143A DE3822143A1 (en) 1987-06-30 1988-06-30 DISPLACEMENT SENSOR WITH OPTICAL SCAN
GB9107670A GB2243442B (en) 1987-06-30 1991-04-11 Optically scanning displacement sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16342787A JPS646810A (en) 1987-06-30 1987-06-30 Optical scanning type displacement sensor

Publications (1)

Publication Number Publication Date
JPS646810A true JPS646810A (en) 1989-01-11

Family

ID=15773694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16342787A Pending JPS646810A (en) 1987-06-30 1987-06-30 Optical scanning type displacement sensor

Country Status (1)

Country Link
JP (1) JPS646810A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0361803A (en) * 1989-04-13 1991-03-18 Mitsubishi Heavy Ind Ltd Coil position detector
JPH03109105U (en) * 1990-02-26 1991-11-08

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119408A (en) * 1985-11-20 1987-05-30 Natl Res Inst For Metals Optical type displacement measuring apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119408A (en) * 1985-11-20 1987-05-30 Natl Res Inst For Metals Optical type displacement measuring apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0361803A (en) * 1989-04-13 1991-03-18 Mitsubishi Heavy Ind Ltd Coil position detector
JPH03109105U (en) * 1990-02-26 1991-11-08

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