JPS6467990A - Wavelength controller for excimer laser - Google Patents

Wavelength controller for excimer laser

Info

Publication number
JPS6467990A
JPS6467990A JP62224499A JP22449987A JPS6467990A JP S6467990 A JPS6467990 A JP S6467990A JP 62224499 A JP62224499 A JP 62224499A JP 22449987 A JP22449987 A JP 22449987A JP S6467990 A JPS6467990 A JP S6467990A
Authority
JP
Japan
Prior art keywords
etalons
wavelength
controller
central wavelength
deltalambda
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62224499A
Other languages
Japanese (ja)
Other versions
JP2652170B2 (en
Inventor
Mitsuo Tsuchiya
Osamu Wakabayashi
Yoshio Amada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP62224499A priority Critical patent/JP2652170B2/en
Publication of JPS6467990A publication Critical patent/JPS6467990A/en
Application granted granted Critical
Publication of JP2652170B2 publication Critical patent/JP2652170B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00—Functional characteristics
    • H01S2301/02—ASE (amplified spontaneous emission), noise; Reduction thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
    • H01S3/137—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity for stabilising of frequency

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To prevent a parasitic oscillation from generating due to the reflected light of a wavelength selecting element by so providing means for restricting the angle of the element as not to invade the reflected light of the element itself or therebetween to the oscillating region of a front mirror. CONSTITUTION:Two etalons E1, E2 are adjacently disposed on a laser optical axis between a rear mirror 3 and a laser chamber 1. The central wavelength of an output laser light detected by a wavelength detector 10 and a central wavelength power detection signal are input to a controller 11 composed of a microcomputer or the like. When the central wavelength lambda of the output laser light and a detection signal of its power are input to the controller 11, the controller 11 calculates a deviation DELTAlambda between the detected central wavelength lambda and a set wavelength lambda0, and so controls the angles theta1, theta2 of the etalons E1, E2 through a driver 12 that the deviation DELTAlambda becomes zero. In this case, a parasitic oscillation is eliminated by so controlling the reflected lights in the etalons or between the etalons at an angle as not to pass the oscillation region of a front mirror 3.
JP62224499A 1987-09-08 1987-09-08 Excimer laser wavelength controller Expired - Lifetime JP2652170B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62224499A JP2652170B2 (en) 1987-09-08 1987-09-08 Excimer laser wavelength controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62224499A JP2652170B2 (en) 1987-09-08 1987-09-08 Excimer laser wavelength controller

Publications (2)

Publication Number Publication Date
JPS6467990A true JPS6467990A (en) 1989-03-14
JP2652170B2 JP2652170B2 (en) 1997-09-10

Family

ID=16814757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62224499A Expired - Lifetime JP2652170B2 (en) 1987-09-08 1987-09-08 Excimer laser wavelength controller

Country Status (1)

Country Link
JP (1) JP2652170B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007513386A (en) * 2003-12-19 2007-05-24 インテル・コーポレーション Etalon positioning using multiple solder balls
KR100809273B1 (en) * 2006-07-28 2008-03-03 삼성전기주식회사 Laser apparatus having same beam exit position

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51122583U (en) * 1975-03-25 1976-10-04
JPS5960312A (en) * 1982-09-30 1984-04-06 Fujitsu Ltd Optical fiber gyro system
JPS62119991A (en) * 1985-11-19 1987-06-01 Nec Corp Single axial mode laser device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51122583U (en) * 1975-03-25 1976-10-04
JPS5960312A (en) * 1982-09-30 1984-04-06 Fujitsu Ltd Optical fiber gyro system
JPS62119991A (en) * 1985-11-19 1987-06-01 Nec Corp Single axial mode laser device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007513386A (en) * 2003-12-19 2007-05-24 インテル・コーポレーション Etalon positioning using multiple solder balls
KR100809273B1 (en) * 2006-07-28 2008-03-03 삼성전기주식회사 Laser apparatus having same beam exit position

Also Published As

Publication number Publication date
JP2652170B2 (en) 1997-09-10

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