JPS6457773A - Wavelength controller for laser - Google Patents

Wavelength controller for laser

Info

Publication number
JPS6457773A
JPS6457773A JP62214396A JP21439687A JPS6457773A JP S6457773 A JPS6457773 A JP S6457773A JP 62214396 A JP62214396 A JP 62214396A JP 21439687 A JP21439687 A JP 21439687A JP S6457773 A JPS6457773 A JP S6457773A
Authority
JP
Japan
Prior art keywords
laser light
narrow band
excimer laser
wavelength
band oscillation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62214396A
Other languages
Japanese (ja)
Other versions
JP2617320B2 (en
Inventor
Masahiko Kowaka
Osamu Wakabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP62214396A priority Critical patent/JP2617320B2/en
Priority to PCT/JP1988/000713 priority patent/WO1989000779A1/en
Priority to DE883891284T priority patent/DE3891284T1/en
Publication of JPS6457773A publication Critical patent/JPS6457773A/en
Priority to US07/721,929 priority patent/US5373515A/en
Application granted granted Critical
Publication of JP2617320B2 publication Critical patent/JP2617320B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
    • H01S3/137—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity for stabilising of frequency
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Abstract

PURPOSE:To control to feed back, and to stably oscillate a laser in a narrow band by employing a laser light as a reference light source, using a diffraction grating type spectroscope, and detecting the absolute value of the wavelength of a narrow band oscillation excimer laser light. CONSTITUTION:A laser light for generating a visible light is employed as a reference light source. A KrF narrow band oscillation excimer laser light 19 forms a resonator of a front mirror 5 and a rear mirror 1. An Ar<+> laser light transmitted through a beam splitter 16 is so aligned as to coincide with KrF narrow band oscillation excimer laser optical axis by mirrors 18, 17. The Ar<+> laser light and the narrow band oscillation excimer laser light are input to a diffraction grating spectroscope 8 to detect the absolute value of the wavelength of the excimer laser light, the difference of the set wavelengths is calculated, and a signal is fed to a driver 10 to shift the selective wavelength of an etalon by the difference of the wavelengths.
JP62214396A 1987-07-17 1987-08-28 Laser wavelength controller Expired - Lifetime JP2617320B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62214396A JP2617320B2 (en) 1987-08-28 1987-08-28 Laser wavelength controller
PCT/JP1988/000713 WO1989000779A1 (en) 1987-07-17 1988-07-18 Apparatus for controlling laser wavelength
DE883891284T DE3891284T1 (en) 1987-07-17 1988-07-18 LASER SHAFT LENGTH CONTROL DEVICE
US07/721,929 US5373515A (en) 1987-07-17 1991-06-21 Laser wavelength controlling apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62214396A JP2617320B2 (en) 1987-08-28 1987-08-28 Laser wavelength controller

Publications (2)

Publication Number Publication Date
JPS6457773A true JPS6457773A (en) 1989-03-06
JP2617320B2 JP2617320B2 (en) 1997-06-04

Family

ID=16655095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62214396A Expired - Lifetime JP2617320B2 (en) 1987-07-17 1987-08-28 Laser wavelength controller

Country Status (1)

Country Link
JP (1) JP2617320B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01101683A (en) * 1987-10-14 1989-04-19 Mitsubishi Electric Corp Stabilization of laser wavelength and wavelength stabilized laser
JPH02306679A (en) * 1989-05-22 1990-12-20 Komatsu Ltd Wavelength controller for laser
JPH0387084A (en) * 1989-06-14 1991-04-11 Matsushita Electric Ind Co Ltd Narrow bandwidth laser equipment
JP2018503872A (en) * 2014-12-29 2018-02-08 エーエスエムエル ホールディング エヌ．ブイ． Feedback control system for alignment system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01101683A (en) * 1987-10-14 1989-04-19 Mitsubishi Electric Corp Stabilization of laser wavelength and wavelength stabilized laser
JPH02306679A (en) * 1989-05-22 1990-12-20 Komatsu Ltd Wavelength controller for laser
JPH0387084A (en) * 1989-06-14 1991-04-11 Matsushita Electric Ind Co Ltd Narrow bandwidth laser equipment
JP2018503872A (en) * 2014-12-29 2018-02-08 エーエスエムエル ホールディング エヌ．ブイ． Feedback control system for alignment system
US10082740B2 (en) 2014-12-29 2018-09-25 Asml Holding N.V. Feedback control system of an alignment system

Also Published As

Publication number Publication date
JP2617320B2 (en) 1997-06-04

Similar Documents

Publication Publication Date Title
US5764678A (en) Wavelength-stabilized narrow band excimer laser
US4975919A (en) Laser wavelength control apparatus
EP0402570A3 (en) Narrow-band laser apparatus
WO2001065704A3 (en) Optical wavelength router based on polarization interferometer
DE69221130D1 (en) System for combining laser beams
US5084884A (en) Method of stabilizing the laser beam and apparatus utilizing the same
WO2003034557A1 (en) Non-polarized laser diode module and non-polarized laser diode light source
GB984590A (en) Improvements in or relating to the tuning of optical masers
JPS6457773A (en) Wavelength controller for laser
US4625305A (en) Multiplexing of optical signals
JP2520153B2 (en) Semiconductor laser light source control device
JPS6422086A (en) Control equipment for laser wavelength
EP0851205A3 (en) Optical interferometer and signal synthesizer using the interferometer
JPS5737893A (en) Semiconductor laser
GB1464069A (en) Device for treating a laser light pulse
JPS6453589A (en) Wavelength controller for excimer laser
US4736378A (en) Integrated acousto-optic mode locking device for a mode locked laser system
JPS56165385A (en) Device for generating high power multiwavelength light pulse
JPS6484681A (en) Laser apparatus
CA2165119A1 (en) Antiresonant waveguide apparatus for periodically selecting a series of at least one optical wavelength from an incoming light signal
JPS6457776A (en) Wavelength controller for laser
CA2102270A1 (en) Wavelength Switching Light Source
JPS55141772A (en) Laser device
JPS6457777A (en) Excimer laser
JP2737181B2 (en) Excimer laser generator