JPS6467854A - Ion beam generator - Google Patents
Ion beam generatorInfo
- Publication number
- JPS6467854A JPS6467854A JP22387687A JP22387687A JPS6467854A JP S6467854 A JPS6467854 A JP S6467854A JP 22387687 A JP22387687 A JP 22387687A JP 22387687 A JP22387687 A JP 22387687A JP S6467854 A JPS6467854 A JP S6467854A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- ion beam
- diverged
- neutralized
- proceed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE:To allow a beam to proceed without being diverged by its own space charges by providing a plasma generator and guiding the plasma near the ion beam travel path with a magnetic field device. CONSTITUTION:Plasma of oxygen, for example, is generated in an ion generating chamber 1 by a high-frequency discharge, 0<-> is extracted by the electric field and neutralized and fed into a target chamber 11. The plasma to be fed to a beam is generated in a high-frequency discharge container 14 and guided near a beam travel path by the magnetic field formed by a guiding coil. The ion beam is enveloped by plasma, and charges of negative ions are neutralized by positive ions or plasma. The beam can thereby proceed without being diverged by its own space charges.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22387687A JPS6467854A (en) | 1987-09-09 | 1987-09-09 | Ion beam generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22387687A JPS6467854A (en) | 1987-09-09 | 1987-09-09 | Ion beam generator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6467854A true JPS6467854A (en) | 1989-03-14 |
Family
ID=16805094
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22387687A Pending JPS6467854A (en) | 1987-09-09 | 1987-09-09 | Ion beam generator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6467854A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021533572A (en) * | 2018-08-06 | 2021-12-02 | マトソン テクノロジー インコーポレイテッドMattson Technology, Inc. | Systems and methods for processing workpieces using a neutral atom beam |
-
1987
- 1987-09-09 JP JP22387687A patent/JPS6467854A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021533572A (en) * | 2018-08-06 | 2021-12-02 | マトソン テクノロジー インコーポレイテッドMattson Technology, Inc. | Systems and methods for processing workpieces using a neutral atom beam |
JP2022166171A (en) * | 2018-08-06 | 2022-11-01 | マトソン テクノロジー インコーポレイテッド | System and method for workpiece processing using neutral atomic beam |
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