JPS6466533A - Electrostatic capacity type differential pressure measuring apparatus - Google Patents

Electrostatic capacity type differential pressure measuring apparatus

Info

Publication number
JPS6466533A
JPS6466533A JP22487987A JP22487987A JPS6466533A JP S6466533 A JPS6466533 A JP S6466533A JP 22487987 A JP22487987 A JP 22487987A JP 22487987 A JP22487987 A JP 22487987A JP S6466533 A JPS6466533 A JP S6466533A
Authority
JP
Japan
Prior art keywords
center
differential pressure
diaphragms
chambers
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22487987A
Other languages
English (en)
Other versions
JPH0444222B2 (ja
Inventor
Kenichi Yoshioka
Kiyoto Yoda
Ryuzo Asada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP22487987A priority Critical patent/JPS6466533A/ja
Publication of JPS6466533A publication Critical patent/JPS6466533A/ja
Publication of JPH0444222B2 publication Critical patent/JPH0444222B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP22487987A 1987-09-08 1987-09-08 Electrostatic capacity type differential pressure measuring apparatus Granted JPS6466533A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22487987A JPS6466533A (en) 1987-09-08 1987-09-08 Electrostatic capacity type differential pressure measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22487987A JPS6466533A (en) 1987-09-08 1987-09-08 Electrostatic capacity type differential pressure measuring apparatus

Publications (2)

Publication Number Publication Date
JPS6466533A true JPS6466533A (en) 1989-03-13
JPH0444222B2 JPH0444222B2 (ja) 1992-07-21

Family

ID=16820597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22487987A Granted JPS6466533A (en) 1987-09-08 1987-09-08 Electrostatic capacity type differential pressure measuring apparatus

Country Status (1)

Country Link
JP (1) JPS6466533A (ja)

Also Published As

Publication number Publication date
JPH0444222B2 (ja) 1992-07-21

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