JPS6465403A - Laser length measuring machine for xy stage positioning - Google Patents

Laser length measuring machine for xy stage positioning

Info

Publication number
JPS6465403A
JPS6465403A JP22176387A JP22176387A JPS6465403A JP S6465403 A JPS6465403 A JP S6465403A JP 22176387 A JP22176387 A JP 22176387A JP 22176387 A JP22176387 A JP 22176387A JP S6465403 A JPS6465403 A JP S6465403A
Authority
JP
Japan
Prior art keywords
light
interferometer
lower table
variation
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22176387A
Other languages
English (en)
Other versions
JPH0575323B2 (ja
Inventor
Chuichi Miyazaki
Toshio Akatsu
Sadao Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP22176387A priority Critical patent/JPS6465403A/ja
Publication of JPS6465403A publication Critical patent/JPS6465403A/ja
Publication of JPH0575323B2 publication Critical patent/JPH0575323B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP22176387A 1987-09-04 1987-09-04 Laser length measuring machine for xy stage positioning Granted JPS6465403A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22176387A JPS6465403A (en) 1987-09-04 1987-09-04 Laser length measuring machine for xy stage positioning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22176387A JPS6465403A (en) 1987-09-04 1987-09-04 Laser length measuring machine for xy stage positioning

Publications (2)

Publication Number Publication Date
JPS6465403A true JPS6465403A (en) 1989-03-10
JPH0575323B2 JPH0575323B2 (ja) 1993-10-20

Family

ID=16771818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22176387A Granted JPS6465403A (en) 1987-09-04 1987-09-04 Laser length measuring machine for xy stage positioning

Country Status (1)

Country Link
JP (1) JPS6465403A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5990268A (en) * 1992-11-23 1999-11-23 Dtm Corporation Sinterable semi-crystalline powder and near-fully dense article formed therewith

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6132121A (ja) * 1984-07-24 1986-02-14 Hitachi Ltd 移動体の位置決め制御機構
JPS61252049A (ja) * 1985-04-30 1986-11-10 Toshiba Corp テ−ブル装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6132121A (ja) * 1984-07-24 1986-02-14 Hitachi Ltd 移動体の位置決め制御機構
JPS61252049A (ja) * 1985-04-30 1986-11-10 Toshiba Corp テ−ブル装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5990268A (en) * 1992-11-23 1999-11-23 Dtm Corporation Sinterable semi-crystalline powder and near-fully dense article formed therewith
USRE39354E1 (en) 1992-11-23 2006-10-17 3D Systems, Inc. Sinterable semi-crystalline powder and near-fully dense article formed therewith

Also Published As

Publication number Publication date
JPH0575323B2 (ja) 1993-10-20

Similar Documents

Publication Publication Date Title
US5500733A (en) Interferometric system for the detection and location of reflecting faults of light-guiding structures
EP1192411B1 (en) Monolithic optical assembly
CA2307582C (en) Monolithic optical assembly and associated retroreflector with beamsplitter assembly
US4191470A (en) Laser-fiber optic interferometric strain gauge
WO2005060677A3 (en) Interferometric microscopy using reflective optics for complex surface shapes
GB1458298A (en) Multiplex interferometer
EP0244275A2 (en) Angle measuring interferometer
US7889354B2 (en) Interferometric measuring device
GB1437517A (en) Optical interference gauge and flatness-testing apparatus
JPS6465403A (en) Laser length measuring machine for xy stage positioning
SE8002604L (sv) Kompensationsanordning
GB1392395A (en) Stabilization of optical path length differences
GB2117132A (en) Interferometer
Fonjallaz et al. Direct determination of main fibre Bragg grating parameters using OLCR
ES2031160T3 (es) Interferometro-refractometro por laser.
US4759624A (en) Method of and apparatus for measuring polarization beat-length in highly-birefringent single-mode optical fibers
DE68925212D1 (de) Verfahren und vorrichtung zur determination des oberflächenprofils von diffus-reflektierenden objekten
JPH0327854B2 (ja)
JPS60203801A (ja) 能動型干渉計
Waters et al. White light interferometer for measuring polarization extinction ratio
JPS646705A (en) Displacement quantity and speed measuring apparatus
JPS6412203A (en) Compound type laser length measuring system and length measuring apparatus
SU1681169A1 (ru) Устройство дл контрол формы поверхности
SU1315799A1 (ru) Устройство дл измерени линейных перемещений
RU2047085C1 (ru) Интерферометр для измерения перемещений двухкоординатного стола