JPS6465403A - Laser length measuring machine for xy stage positioning - Google Patents
Laser length measuring machine for xy stage positioningInfo
- Publication number
- JPS6465403A JPS6465403A JP22176387A JP22176387A JPS6465403A JP S6465403 A JPS6465403 A JP S6465403A JP 22176387 A JP22176387 A JP 22176387A JP 22176387 A JP22176387 A JP 22176387A JP S6465403 A JPS6465403 A JP S6465403A
- Authority
- JP
- Japan
- Prior art keywords
- light
- interferometer
- lower table
- variation
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22176387A JPS6465403A (en) | 1987-09-04 | 1987-09-04 | Laser length measuring machine for xy stage positioning |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22176387A JPS6465403A (en) | 1987-09-04 | 1987-09-04 | Laser length measuring machine for xy stage positioning |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6465403A true JPS6465403A (en) | 1989-03-10 |
JPH0575323B2 JPH0575323B2 (ja) | 1993-10-20 |
Family
ID=16771818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22176387A Granted JPS6465403A (en) | 1987-09-04 | 1987-09-04 | Laser length measuring machine for xy stage positioning |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6465403A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5990268A (en) * | 1992-11-23 | 1999-11-23 | Dtm Corporation | Sinterable semi-crystalline powder and near-fully dense article formed therewith |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6132121A (ja) * | 1984-07-24 | 1986-02-14 | Hitachi Ltd | 移動体の位置決め制御機構 |
JPS61252049A (ja) * | 1985-04-30 | 1986-11-10 | Toshiba Corp | テ−ブル装置 |
-
1987
- 1987-09-04 JP JP22176387A patent/JPS6465403A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6132121A (ja) * | 1984-07-24 | 1986-02-14 | Hitachi Ltd | 移動体の位置決め制御機構 |
JPS61252049A (ja) * | 1985-04-30 | 1986-11-10 | Toshiba Corp | テ−ブル装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5990268A (en) * | 1992-11-23 | 1999-11-23 | Dtm Corporation | Sinterable semi-crystalline powder and near-fully dense article formed therewith |
USRE39354E1 (en) | 1992-11-23 | 2006-10-17 | 3D Systems, Inc. | Sinterable semi-crystalline powder and near-fully dense article formed therewith |
Also Published As
Publication number | Publication date |
---|---|
JPH0575323B2 (ja) | 1993-10-20 |
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