JPS646506Y2 - - Google Patents

Info

Publication number
JPS646506Y2
JPS646506Y2 JP1984152769U JP15276984U JPS646506Y2 JP S646506 Y2 JPS646506 Y2 JP S646506Y2 JP 1984152769 U JP1984152769 U JP 1984152769U JP 15276984 U JP15276984 U JP 15276984U JP S646506 Y2 JPS646506 Y2 JP S646506Y2
Authority
JP
Japan
Prior art keywords
compound
container
compound vapor
guide hole
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984152769U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6169269U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984152769U priority Critical patent/JPS646506Y2/ja
Publication of JPS6169269U publication Critical patent/JPS6169269U/ja
Application granted granted Critical
Publication of JPS646506Y2 publication Critical patent/JPS646506Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984152769U 1984-10-09 1984-10-09 Expired JPS646506Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984152769U JPS646506Y2 (enExample) 1984-10-09 1984-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984152769U JPS646506Y2 (enExample) 1984-10-09 1984-10-09

Publications (2)

Publication Number Publication Date
JPS6169269U JPS6169269U (enExample) 1986-05-12
JPS646506Y2 true JPS646506Y2 (enExample) 1989-02-20

Family

ID=30710818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984152769U Expired JPS646506Y2 (enExample) 1984-10-09 1984-10-09

Country Status (1)

Country Link
JP (1) JPS646506Y2 (enExample)

Also Published As

Publication number Publication date
JPS6169269U (enExample) 1986-05-12

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