JPS6464323A - Optical gas ashing device - Google Patents
Optical gas ashing deviceInfo
- Publication number
- JPS6464323A JPS6464323A JP22014987A JP22014987A JPS6464323A JP S6464323 A JPS6464323 A JP S6464323A JP 22014987 A JP22014987 A JP 22014987A JP 22014987 A JP22014987 A JP 22014987A JP S6464323 A JPS6464323 A JP S6464323A
- Authority
- JP
- Japan
- Prior art keywords
- treated
- matter
- base
- chamber
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE:To uniformly surface-treat by supplying reacting gas from a plurality of holes at a time difference to provide relatively similar effect to the fact that the surface to be treated might rotate. CONSTITUTION:A light source 1 is disposed in a lamp housing 15, and a purging gas supply port 10 and a discharge port 11 are provided at the housing 15. A nonrotating base 7 is provided in a treating chamber 16, a heater 8 and a temperature sensor 9 are contained, connected to a power source, a temperature regulator out of the chamber 16 via leads 18, 19, and the base 7 is controlled at its temperature. A matter 6 to be treated is placed on the base 7. The housing 15 and the chamber 16 are partitioned by a plate 5 being light transmissible and having a plurality of nozzles 3 for supplying reaction gas. The nozzles 3 are connected through valves 4 which are electrically opened and closed to a reaction gas supply source via pipes 2. The reaction gas is fed through a narrow gap between the surface of the matter 6 and the plate 5, and discharged from outlets 12, 13 together with the gas reacted and generated on the matter 6 to be treated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22014987A JPS6464323A (en) | 1987-09-04 | 1987-09-04 | Optical gas ashing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22014987A JPS6464323A (en) | 1987-09-04 | 1987-09-04 | Optical gas ashing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6464323A true JPS6464323A (en) | 1989-03-10 |
Family
ID=16746663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22014987A Pending JPS6464323A (en) | 1987-09-04 | 1987-09-04 | Optical gas ashing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6464323A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0184427U (en) * | 1987-11-26 | 1989-06-05 |
-
1987
- 1987-09-04 JP JP22014987A patent/JPS6464323A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0184427U (en) * | 1987-11-26 | 1989-06-05 |
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