JPS6461718A - Microscope device - Google Patents

Abstract

PURPOSE:To effectively observe an image by providing an electron microscope possessing a high magnification area and an optical system microscope possessing a low magnification area and making a sample scale movable to a set position. CONSTITUTION:The sample is observed with the optical system microscope 1 possessing the low magnification. At such a time, if it is judged by an operation control means CPU 6 that the set value of a magnification setting means 5 needs to be magnified in high magnification, a 2nd variable magnification means 8 is made to operate to take a sight. The CPU 6 stores the deviation of a reference position from a sight mark which is detected by a deviation detector. And a 1st arithmetic processing is performed so that the reference position coincides with the optical axis C2 of the electron microscope 2. Moreover, the CPU 6 recognizes the need for the variable magnification again and performs a 2nd arithmetic processing based on the magnification, the position of the sample scale, the respective signals of deviation quantity and the processed result of the 1st arithmetic processing. The CPU 6 generates a driving signal based on the processes results of the 1st and 2nd arithmetic processing so as to move the sample scale and to make the reference position coincide with the optical axis C2, so that the image can be effectively observed with the electron microscope 2 possessing the high magnification area.