JPS6461674A - Low-temperature testing device - Google Patents

Low-temperature testing device

Info

Publication number
JPS6461674A
JPS6461674A JP21964087A JP21964087A JPS6461674A JP S6461674 A JPS6461674 A JP S6461674A JP 21964087 A JP21964087 A JP 21964087A JP 21964087 A JP21964087 A JP 21964087A JP S6461674 A JPS6461674 A JP S6461674A
Authority
JP
Japan
Prior art keywords
temperature
low
semiconductor device
opening part
capacitors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21964087A
Other languages
Japanese (ja)
Inventor
Yoichi Honchi
Takamasa Fujii
Kazumitsu Tajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Kyushu Ltd
Original Assignee
Tokyo Electron Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Kyushu Ltd filed Critical Tokyo Electron Kyushu Ltd
Priority to JP21964087A priority Critical patent/JPS6461674A/en
Publication of JPS6461674A publication Critical patent/JPS6461674A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To preclude dew condensation and dew sticking on a body to be tested effectively without increasing the number of members by arranging part of freezing cycle equipment which rises in temperature at its external wall above ambient temperature nearby the opening part of a low-temperature test part. CONSTITUTION:A semiconductor device 6 which is guided up to the low- temperature test part 13 is arranged in the low-temperature test part 13 through the opening part 13a and characteristic inspection is carried out. Here, capacitors 3 are provided above and below a conveyance path for the semiconductor device 6 nearby the opening part 13a. Those capacitors radiate the heat of vapor compressed by a comparator and are higher in temperature than the space surrounding the test part 13. The periphery of the opening part 13a exceeds its ambient temperature and dew condensation is caused on the surface of the semiconductor device 6. Thus, simple means for arranging some of the capacitors securely precludes the dew condensation and dew sticking on the semiconductor device.
JP21964087A 1987-09-02 1987-09-02 Low-temperature testing device Pending JPS6461674A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21964087A JPS6461674A (en) 1987-09-02 1987-09-02 Low-temperature testing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21964087A JPS6461674A (en) 1987-09-02 1987-09-02 Low-temperature testing device

Publications (1)

Publication Number Publication Date
JPS6461674A true JPS6461674A (en) 1989-03-08

Family

ID=16738695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21964087A Pending JPS6461674A (en) 1987-09-02 1987-09-02 Low-temperature testing device

Country Status (1)

Country Link
JP (1) JPS6461674A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4810504A (en) * 1987-03-19 1989-03-07 Huls Aktiengesellschaft Method of producing a mushroom aroma in mushroom cell masses
JP2009234703A (en) * 2008-03-26 2009-10-15 Kumagai Gumi Co Ltd Roller conveyor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4810504A (en) * 1987-03-19 1989-03-07 Huls Aktiengesellschaft Method of producing a mushroom aroma in mushroom cell masses
JP2009234703A (en) * 2008-03-26 2009-10-15 Kumagai Gumi Co Ltd Roller conveyor

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