JPS6459818A - Electrode for dry etching apparatus - Google Patents

Electrode for dry etching apparatus

Info

Publication number
JPS6459818A
JPS6459818A JP21539987A JP21539987A JPS6459818A JP S6459818 A JPS6459818 A JP S6459818A JP 21539987 A JP21539987 A JP 21539987A JP 21539987 A JP21539987 A JP 21539987A JP S6459818 A JPS6459818 A JP S6459818A
Authority
JP
Japan
Prior art keywords
electrode
sintered
substance
whose
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21539987A
Other languages
English (en)
Inventor
Yasuo Matsushita
Kosuke Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP21539987A priority Critical patent/JPS6459818A/ja
Publication of JPS6459818A publication Critical patent/JPS6459818A/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP21539987A 1987-08-31 1987-08-31 Electrode for dry etching apparatus Pending JPS6459818A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21539987A JPS6459818A (en) 1987-08-31 1987-08-31 Electrode for dry etching apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21539987A JPS6459818A (en) 1987-08-31 1987-08-31 Electrode for dry etching apparatus

Publications (1)

Publication Number Publication Date
JPS6459818A true JPS6459818A (en) 1989-03-07

Family

ID=16671680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21539987A Pending JPS6459818A (en) 1987-08-31 1987-08-31 Electrode for dry etching apparatus

Country Status (1)

Country Link
JP (1) JPS6459818A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03129729A (ja) * 1989-07-03 1991-06-03 Ibiden Co Ltd プラズマエッチング用電極板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03129729A (ja) * 1989-07-03 1991-06-03 Ibiden Co Ltd プラズマエッチング用電極板

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