JPS645784A - Conveyor - Google Patents

Conveyor

Info

Publication number
JPS645784A
JPS645784A JP16474587A JP16474587A JPS645784A JP S645784 A JPS645784 A JP S645784A JP 16474587 A JP16474587 A JP 16474587A JP 16474587 A JP16474587 A JP 16474587A JP S645784 A JPS645784 A JP S645784A
Authority
JP
Japan
Prior art keywords
conveyed body
arm
conveyed
control device
detection signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16474587A
Other languages
Japanese (ja)
Other versions
JP2575717B2 (en
Inventor
Masami Akimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Kyushu Ltd
Original Assignee
Tokyo Electron Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Kyushu Ltd filed Critical Tokyo Electron Kyushu Ltd
Priority to JP16474587A priority Critical patent/JP2575717B2/en
Publication of JPS645784A publication Critical patent/JPS645784A/en
Application granted granted Critical
Publication of JP2575717B2 publication Critical patent/JP2575717B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Controlling Sheets Or Webs (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

PURPOSE: To prevent the position drift of a conveyed body due to conveyance and to efficiently convey it by providing a sensor for detecting the edge of the conveyed body at the tip section of a conveyed body holding arm, and providing a control device for controlling the movement of the arm based on the detection signal of the sensor. CONSTITUTION: A sensor 14 at the tip section of an arm 11 detects the edge of a conveyed body 8 at the time of the moving action of the arm 11 before holding the conveyed body 9 such as a semiconductor integrated circuit or a liquid crystal display substrate and after releasing it. The detection signal is inputted to a control device 19, and the control device 19 calculates the position drift of the conveyed body 9 based on the detection signal and controls the movement of the arm 11 to correct the position drift, thereby the arm 11 holds the desired position of the conveyed body 9 and prevents the position drift of the conveyed body 9 due to conveyance when the conveyed body 9 is carried out from a cassette 10. The conveyed body 9 can be efficiently conveyed.
JP16474587A 1987-06-30 1987-06-30 Transport device for semiconductor substrates or liquid crystal substrates Expired - Lifetime JP2575717B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16474587A JP2575717B2 (en) 1987-06-30 1987-06-30 Transport device for semiconductor substrates or liquid crystal substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16474587A JP2575717B2 (en) 1987-06-30 1987-06-30 Transport device for semiconductor substrates or liquid crystal substrates

Publications (2)

Publication Number Publication Date
JPS645784A true JPS645784A (en) 1989-01-10
JP2575717B2 JP2575717B2 (en) 1997-01-29

Family

ID=15799105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16474587A Expired - Lifetime JP2575717B2 (en) 1987-06-30 1987-06-30 Transport device for semiconductor substrates or liquid crystal substrates

Country Status (1)

Country Link
JP (1) JP2575717B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02218578A (en) * 1989-02-17 1990-08-31 Tokiko Eng Kk Transfer device for work
JPH0311648A (en) * 1989-06-07 1991-01-18 Nec Corp Semiconductor-wafer conveyer apparatus
JPH06169003A (en) * 1992-11-27 1994-06-14 Dainippon Screen Mfg Co Ltd Substrate transfer apparatus
JPH06297363A (en) * 1993-01-28 1994-10-25 Applied Materials Inc Method and device for aligning substrate for carrying in and out using robot mechanism
JP2002270674A (en) * 2001-03-14 2002-09-20 Disco Abrasive Syst Ltd Carry-out device
JP2002289673A (en) * 2001-03-26 2002-10-04 Disco Abrasive Syst Ltd Carrying in/out apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200304A (en) * 1983-04-26 1984-11-13 Murata Mach Ltd Control method of industrial robot
JPS59227379A (en) * 1983-06-09 1984-12-20 株式会社アマダ Method and device for supplying work

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200304A (en) * 1983-04-26 1984-11-13 Murata Mach Ltd Control method of industrial robot
JPS59227379A (en) * 1983-06-09 1984-12-20 株式会社アマダ Method and device for supplying work

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02218578A (en) * 1989-02-17 1990-08-31 Tokiko Eng Kk Transfer device for work
JPH0311648A (en) * 1989-06-07 1991-01-18 Nec Corp Semiconductor-wafer conveyer apparatus
JPH06169003A (en) * 1992-11-27 1994-06-14 Dainippon Screen Mfg Co Ltd Substrate transfer apparatus
JPH06297363A (en) * 1993-01-28 1994-10-25 Applied Materials Inc Method and device for aligning substrate for carrying in and out using robot mechanism
JP2002270674A (en) * 2001-03-14 2002-09-20 Disco Abrasive Syst Ltd Carry-out device
JP2002289673A (en) * 2001-03-26 2002-10-04 Disco Abrasive Syst Ltd Carrying in/out apparatus

Also Published As

Publication number Publication date
JP2575717B2 (en) 1997-01-29

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