JPS6457103A - Measuring apparatus of distance and inclination angle - Google Patents

Abstract

PURPOSE:To make small a sensor unit constructed of three sets of projecting- photosensing systems, by disposing a projecting element at each vertex of an equilateral triangle and a photosensing element at each vertex of a revolved equilateral triangle of said equilateral triangle having the identical center with this triangle and obtained by rotating the same by an angle of about 60 deg.. CONSTITUTION:A sensor unit 1 comprises laser diodes 3-5, projector lenses 12-14 projecting the light of these diodes onto an object surface 2 of measurement to form light spots 9-11 thereon, light-receiving lenses 12-14 receiving the light reflected by the spots 9-11, and PSDs 15-17 disposed as photosensing elements in the focal positions of these lenses at prescribed angles of inclination to the optical axis. The larger photosensing systems 12-15-14-17 are disposed at the vertexes of an equilateral triangle respectively, while the smaller projecting systems 3-6-5-8 are disposed at the vertexes of a revolved equilateral triangle of said equilateral triangle having the identical center with this equilateral triangle and obtained by revolving the same by the angle of 60 deg., so that projecting-photosensing systems 3-6 and 12-15-5-8 and 14-17 forming sets respectively are opposite to each other. By this constitution, the distance and the angle of inclination of the object surface 2 can be measured accurately, while the sensor unit can be made small and compact.