JPS6421311A - Fine angle displacement measuring apparatus - Google Patents

Fine angle displacement measuring apparatus

Info

Publication number
JPS6421311A
JPS6421311A JP17751487A JP17751487A JPS6421311A JP S6421311 A JPS6421311 A JP S6421311A JP 17751487 A JP17751487 A JP 17751487A JP 17751487 A JP17751487 A JP 17751487A JP S6421311 A JPS6421311 A JP S6421311A
Authority
JP
Japan
Prior art keywords
photodetector
incident
light receiving
receiving surface
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17751487A
Other languages
Japanese (ja)
Inventor
Shinichi Wakana
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17751487A priority Critical patent/JPS6421311A/en
Publication of JPS6421311A publication Critical patent/JPS6421311A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To achieve a higher measuring accuracy, by always making a light beam reflected by a surface to be inspected incident in a range with assured linearity on a light receiving surface of a photodetector by a means for deflection in two axes orthogonal to each other provided between the surface being inspected and the photodetector. CONSTITUTION:When a laser beam 2 from a laser beam source 1 is irradiated to a surface 3 to be inspected with the plane bearing thereof deviated by phifrom a reference direction, the reflected light 4 thereof is incident into a means 5 for deflection in two axes orthogonal to each other and then, into a photodetector 6 having a divided light receiving surface. With the rotation of galvano mirrors 51 and 52 of the means 5, the reflected light 4 is deflected with a control independently in the X and Y axes to correct the incident position thereof on the light receiving surface of the photodetector 6. The correction is performed so that the reflected light 4 is incident almost into the center of light receiving surface of the photodetector 6 when entering near a limit of a dynamic range of the photodetector 6.
JP17751487A 1987-07-16 1987-07-16 Fine angle displacement measuring apparatus Pending JPS6421311A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17751487A JPS6421311A (en) 1987-07-16 1987-07-16 Fine angle displacement measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17751487A JPS6421311A (en) 1987-07-16 1987-07-16 Fine angle displacement measuring apparatus

Publications (1)

Publication Number Publication Date
JPS6421311A true JPS6421311A (en) 1989-01-24

Family

ID=16032239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17751487A Pending JPS6421311A (en) 1987-07-16 1987-07-16 Fine angle displacement measuring apparatus

Country Status (1)

Country Link
JP (1) JPS6421311A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022504295A (en) * 2018-10-02 2022-01-13 カール・ツァイス・エスエムティー・ゲーエムベーハー Devices and methods for measuring the beam angle of a light beam guided by a beam-guided optical unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022504295A (en) * 2018-10-02 2022-01-13 カール・ツァイス・エスエムティー・ゲーエムベーハー Devices and methods for measuring the beam angle of a light beam guided by a beam-guided optical unit

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