JPS6455839A - Wafer treating basket and treating method for wafer - Google Patents
Wafer treating basket and treating method for waferInfo
- Publication number
- JPS6455839A JPS6455839A JP62212319A JP21231987A JPS6455839A JP S6455839 A JPS6455839 A JP S6455839A JP 62212319 A JP62212319 A JP 62212319A JP 21231987 A JP21231987 A JP 21231987A JP S6455839 A JPS6455839 A JP S6455839A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- basket
- ribs
- wafers
- treating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE:To accelerate the drainage of the surface of a wafer by forming a plurality of upper ribs formed at position in contact with the wafer separated from lower ribs above predetermined lower position in a basket without making contact with the wafer of predetermined lower position in the basket. CONSTITUTION:A plurality of wafers 20 are so aligned as to be superposed in a direction perpendicular to this paper face to be contained in a basket 30. Lower ribs 32-1, 32-1 are so separated that the wafers 20 contained in the basket 30 are not in contact with each other. Upper ribs 33-1, 33-2 are secured to sidewall members 31-1, 31-2 separately above the lower ribs 32-1, 32-2 corresponding to the upper ribs 33-1, 33-2. The ribs 33-1, 33-2 are provided at the positions not contacted with the wafers 10 when the wafers 20 are disposed at the lower position in the basket 30. Thus, the wafers 20 are not removed above the liquid surface of a cleaning tank in a state that a wafer film exists between the ribs 33-1, 33-2 and 32-1, 32-2, and no water mark is generated on the surface after drying.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62212319A JPS6455839A (en) | 1987-08-26 | 1987-08-26 | Wafer treating basket and treating method for wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62212319A JPS6455839A (en) | 1987-08-26 | 1987-08-26 | Wafer treating basket and treating method for wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6455839A true JPS6455839A (en) | 1989-03-02 |
Family
ID=16620577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62212319A Pending JPS6455839A (en) | 1987-08-26 | 1987-08-26 | Wafer treating basket and treating method for wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6455839A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102161408A (en) * | 2009-08-26 | 2011-08-24 | Lg化学株式会社 | Carrier box for polarizer |
| CN102172584A (en) * | 2011-02-14 | 2011-09-07 | 常州亿晶光电科技有限公司 | Loading device specially for silicon material square section pickling |
-
1987
- 1987-08-26 JP JP62212319A patent/JPS6455839A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102161408A (en) * | 2009-08-26 | 2011-08-24 | Lg化学株式会社 | Carrier box for polarizer |
| CN102172584A (en) * | 2011-02-14 | 2011-09-07 | 常州亿晶光电科技有限公司 | Loading device specially for silicon material square section pickling |
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