JPS6454774A - Manufacture of superconducting device - Google Patents
Manufacture of superconducting deviceInfo
- Publication number
- JPS6454774A JPS6454774A JP62212044A JP21204487A JPS6454774A JP S6454774 A JPS6454774 A JP S6454774A JP 62212044 A JP62212044 A JP 62212044A JP 21204487 A JP21204487 A JP 21204487A JP S6454774 A JPS6454774 A JP S6454774A
- Authority
- JP
- Japan
- Prior art keywords
- film
- superconducting
- nonoxidative
- manufacture
- collected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000010408 film Substances 0.000 abstract 8
- 229910009203 Y-Ba-Cu-O Inorganic materials 0.000 abstract 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 abstract 2
- 230000001681 protective effect Effects 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 239000002887 superconductor Substances 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 238000004458 analytical method Methods 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 150000004706 metal oxides Chemical class 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052594 sapphire Inorganic materials 0.000 abstract 1
- 239000010980 sapphire Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62212044A JPS6454774A (en) | 1987-08-26 | 1987-08-26 | Manufacture of superconducting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62212044A JPS6454774A (en) | 1987-08-26 | 1987-08-26 | Manufacture of superconducting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6454774A true JPS6454774A (en) | 1989-03-02 |
Family
ID=16615940
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62212044A Pending JPS6454774A (en) | 1987-08-26 | 1987-08-26 | Manufacture of superconducting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6454774A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02192402A (ja) * | 1989-01-20 | 1990-07-30 | Fujitsu Ltd | 酸化物超伝導材料の保護膜の形成方法 |
-
1987
- 1987-08-26 JP JP62212044A patent/JPS6454774A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02192402A (ja) * | 1989-01-20 | 1990-07-30 | Fujitsu Ltd | 酸化物超伝導材料の保護膜の形成方法 |
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