JPS645441U - - Google Patents
Info
- Publication number
- JPS645441U JPS645441U JP1987098624U JP9862487U JPS645441U JP S645441 U JPS645441 U JP S645441U JP 1987098624 U JP1987098624 U JP 1987098624U JP 9862487 U JP9862487 U JP 9862487U JP S645441 U JPS645441 U JP S645441U
- Authority
- JP
- Japan
- Prior art keywords
- side wall
- substrate
- cleaning jig
- receiving member
- wall member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims 2
- 239000004809 Teflon Substances 0.000 claims 1
- 229920006362 Teflon® Polymers 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987098624U JPS645441U (OSRAM) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987098624U JPS645441U (OSRAM) | 1987-06-29 | 1987-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS645441U true JPS645441U (OSRAM) | 1989-01-12 |
Family
ID=31325063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987098624U Pending JPS645441U (OSRAM) | 1987-06-29 | 1987-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645441U (OSRAM) |
-
1987
- 1987-06-29 JP JP1987098624U patent/JPS645441U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS645441U (OSRAM) | ||
| JPS638902Y2 (OSRAM) | ||
| JP2514030Y2 (ja) | チップトレィ | |
| JPS6272590U (OSRAM) | ||
| JPS6333634U (OSRAM) | ||
| JPS60926U (ja) | 半導体基板の収納容器 | |
| JPS6430825U (OSRAM) | ||
| JPS61192494U (OSRAM) | ||
| JPS61112641U (OSRAM) | ||
| JP3078645U (ja) | 机の引き出し | |
| JPS60151135U (ja) | ウエ−ハキヤリヤ | |
| JPS6389970U (OSRAM) | ||
| JPS6456731U (OSRAM) | ||
| JPH03120792U (OSRAM) | ||
| JPS5865369U (ja) | ウエハ支持装置 | |
| JPS6383600U (OSRAM) | ||
| JPS6366190U (OSRAM) | ||
| JPH0224532U (OSRAM) | ||
| JPS63153256U (OSRAM) | ||
| JPS6437651U (OSRAM) | ||
| JPS6239607U (OSRAM) | ||
| JPS58138787U (ja) | 板状体組込み型の金属製建具 | |
| JPS63200018U (OSRAM) | ||
| JPS6256622U (OSRAM) | ||
| JPS6122347U (ja) | 半導体ウエハ保持用ボ−ト |