JPS6454329U - - Google Patents
Info
- Publication number
- JPS6454329U JPS6454329U JP14962187U JP14962187U JPS6454329U JP S6454329 U JPS6454329 U JP S6454329U JP 14962187 U JP14962187 U JP 14962187U JP 14962187 U JP14962187 U JP 14962187U JP S6454329 U JPS6454329 U JP S6454329U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- region
- compound semiconductor
- film forming
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14962187U JPS6454329U (nl) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14962187U JPS6454329U (nl) | 1987-09-30 | 1987-09-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6454329U true JPS6454329U (nl) | 1989-04-04 |
Family
ID=31422017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14962187U Pending JPS6454329U (nl) | 1987-09-30 | 1987-09-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6454329U (nl) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7632093B2 (en) | 2004-09-06 | 2009-12-15 | Samsung Electronics Co., Ltd. | Pyrolysis furnace having gas flowing path controller |
-
1987
- 1987-09-30 JP JP14962187U patent/JPS6454329U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7632093B2 (en) | 2004-09-06 | 2009-12-15 | Samsung Electronics Co., Ltd. | Pyrolysis furnace having gas flowing path controller |
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