JPS6453772U - - Google Patents

Info

Publication number
JPS6453772U
JPS6453772U JP14674387U JP14674387U JPS6453772U JP S6453772 U JPS6453772 U JP S6453772U JP 14674387 U JP14674387 U JP 14674387U JP 14674387 U JP14674387 U JP 14674387U JP S6453772 U JPS6453772 U JP S6453772U
Authority
JP
Japan
Prior art keywords
molecular beam
source cell
gas
crystal growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14674387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14674387U priority Critical patent/JPS6453772U/ja
Publication of JPS6453772U publication Critical patent/JPS6453772U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP14674387U 1987-09-25 1987-09-25 Pending JPS6453772U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14674387U JPS6453772U (enrdf_load_stackoverflow) 1987-09-25 1987-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14674387U JPS6453772U (enrdf_load_stackoverflow) 1987-09-25 1987-09-25

Publications (1)

Publication Number Publication Date
JPS6453772U true JPS6453772U (enrdf_load_stackoverflow) 1989-04-03

Family

ID=31416518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14674387U Pending JPS6453772U (enrdf_load_stackoverflow) 1987-09-25 1987-09-25

Country Status (1)

Country Link
JP (1) JPS6453772U (enrdf_load_stackoverflow)

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