JPS63106767U - - Google Patents
Info
- Publication number
- JPS63106767U JPS63106767U JP19877886U JP19877886U JPS63106767U JP S63106767 U JPS63106767 U JP S63106767U JP 19877886 U JP19877886 U JP 19877886U JP 19877886 U JP19877886 U JP 19877886U JP S63106767 U JPS63106767 U JP S63106767U
- Authority
- JP
- Japan
- Prior art keywords
- partition wall
- energy source
- double structure
- growth apparatus
- optical energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims 3
- 239000002826 coolant Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19877886U JPS63106767U (enrdf_load_stackoverflow) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19877886U JPS63106767U (enrdf_load_stackoverflow) | 1986-12-26 | 1986-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106767U true JPS63106767U (enrdf_load_stackoverflow) | 1988-07-09 |
Family
ID=31159781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19877886U Pending JPS63106767U (enrdf_load_stackoverflow) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106767U (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04254489A (ja) * | 1991-02-01 | 1992-09-09 | Nippon Seisan Gijutsu Kenkyusho:Kk | 減圧ｃｖｄ装置 |
| JP2003500865A (ja) * | 1999-05-27 | 2003-01-07 | ステアーグ シーヴイディー システムズ リミテッド | 冷却されるウィンドウ |
-
1986
- 1986-12-26 JP JP19877886U patent/JPS63106767U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04254489A (ja) * | 1991-02-01 | 1992-09-09 | Nippon Seisan Gijutsu Kenkyusho:Kk | 減圧ｃｖｄ装置 |
| JP2003500865A (ja) * | 1999-05-27 | 2003-01-07 | ステアーグ シーヴイディー システムズ リミテッド | 冷却されるウィンドウ |