JPS6453752U - - Google Patents

Info

Publication number
JPS6453752U
JPS6453752U JP14836787U JP14836787U JPS6453752U JP S6453752 U JPS6453752 U JP S6453752U JP 14836787 U JP14836787 U JP 14836787U JP 14836787 U JP14836787 U JP 14836787U JP S6453752 U JPS6453752 U JP S6453752U
Authority
JP
Japan
Prior art keywords
chamber
substrate
pair
vacuum
film production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14836787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14836787U priority Critical patent/JPS6453752U/ja
Publication of JPS6453752U publication Critical patent/JPS6453752U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14836787U 1987-09-30 1987-09-30 Pending JPS6453752U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14836787U JPS6453752U (enrdf_load_stackoverflow) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14836787U JPS6453752U (enrdf_load_stackoverflow) 1987-09-30 1987-09-30

Publications (1)

Publication Number Publication Date
JPS6453752U true JPS6453752U (enrdf_load_stackoverflow) 1989-04-03

Family

ID=31419624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14836787U Pending JPS6453752U (enrdf_load_stackoverflow) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPS6453752U (enrdf_load_stackoverflow)

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