JPS6378068U - - Google Patents

Info

Publication number
JPS6378068U
JPS6378068U JP17224486U JP17224486U JPS6378068U JP S6378068 U JPS6378068 U JP S6378068U JP 17224486 U JP17224486 U JP 17224486U JP 17224486 U JP17224486 U JP 17224486U JP S6378068 U JPS6378068 U JP S6378068U
Authority
JP
Japan
Prior art keywords
roll
film surface
film
vacuum chamber
rolls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17224486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17224486U priority Critical patent/JPS6378068U/ja
Publication of JPS6378068U publication Critical patent/JPS6378068U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17224486U 1986-11-10 1986-11-10 Pending JPS6378068U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17224486U JPS6378068U (enrdf_load_stackoverflow) 1986-11-10 1986-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17224486U JPS6378068U (enrdf_load_stackoverflow) 1986-11-10 1986-11-10

Publications (1)

Publication Number Publication Date
JPS6378068U true JPS6378068U (enrdf_load_stackoverflow) 1988-05-24

Family

ID=31108611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17224486U Pending JPS6378068U (enrdf_load_stackoverflow) 1986-11-10 1986-11-10

Country Status (1)

Country Link
JP (1) JPS6378068U (enrdf_load_stackoverflow)

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