JPH02106459U - - Google Patents

Info

Publication number
JPH02106459U
JPH02106459U JP1359389U JP1359389U JPH02106459U JP H02106459 U JPH02106459 U JP H02106459U JP 1359389 U JP1359389 U JP 1359389U JP 1359389 U JP1359389 U JP 1359389U JP H02106459 U JPH02106459 U JP H02106459U
Authority
JP
Japan
Prior art keywords
evaporation
chamber
vacuum
substrate
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1359389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1359389U priority Critical patent/JPH02106459U/ja
Publication of JPH02106459U publication Critical patent/JPH02106459U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1359389U 1989-02-09 1989-02-09 Pending JPH02106459U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1359389U JPH02106459U (enrdf_load_stackoverflow) 1989-02-09 1989-02-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1359389U JPH02106459U (enrdf_load_stackoverflow) 1989-02-09 1989-02-09

Publications (1)

Publication Number Publication Date
JPH02106459U true JPH02106459U (enrdf_load_stackoverflow) 1990-08-23

Family

ID=31224032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1359389U Pending JPH02106459U (enrdf_load_stackoverflow) 1989-02-09 1989-02-09

Country Status (1)

Country Link
JP (1) JPH02106459U (enrdf_load_stackoverflow)

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