JPS6329930U - - Google Patents

Info

Publication number
JPS6329930U
JPS6329930U JP12426186U JP12426186U JPS6329930U JP S6329930 U JPS6329930 U JP S6329930U JP 12426186 U JP12426186 U JP 12426186U JP 12426186 U JP12426186 U JP 12426186U JP S6329930 U JPS6329930 U JP S6329930U
Authority
JP
Japan
Prior art keywords
mounting surface
excite
substrate holder
thin film
circumferential direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12426186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12426186U priority Critical patent/JPS6329930U/ja
Publication of JPS6329930U publication Critical patent/JPS6329930U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP12426186U 1986-08-12 1986-08-12 Pending JPS6329930U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12426186U JPS6329930U (enrdf_load_stackoverflow) 1986-08-12 1986-08-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12426186U JPS6329930U (enrdf_load_stackoverflow) 1986-08-12 1986-08-12

Publications (1)

Publication Number Publication Date
JPS6329930U true JPS6329930U (enrdf_load_stackoverflow) 1988-02-27

Family

ID=31016113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12426186U Pending JPS6329930U (enrdf_load_stackoverflow) 1986-08-12 1986-08-12

Country Status (1)

Country Link
JP (1) JPS6329930U (enrdf_load_stackoverflow)

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