JPS62186971U - - Google Patents

Info

Publication number
JPS62186971U
JPS62186971U JP7185986U JP7185986U JPS62186971U JP S62186971 U JPS62186971 U JP S62186971U JP 7185986 U JP7185986 U JP 7185986U JP 7185986 U JP7185986 U JP 7185986U JP S62186971 U JPS62186971 U JP S62186971U
Authority
JP
Japan
Prior art keywords
thin film
forming apparatus
film forming
peripheral surface
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7185986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7185986U priority Critical patent/JPS62186971U/ja
Publication of JPS62186971U publication Critical patent/JPS62186971U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7185986U 1986-05-15 1986-05-15 Pending JPS62186971U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7185986U JPS62186971U (enrdf_load_stackoverflow) 1986-05-15 1986-05-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7185986U JPS62186971U (enrdf_load_stackoverflow) 1986-05-15 1986-05-15

Publications (1)

Publication Number Publication Date
JPS62186971U true JPS62186971U (enrdf_load_stackoverflow) 1987-11-27

Family

ID=30914793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7185986U Pending JPS62186971U (enrdf_load_stackoverflow) 1986-05-15 1986-05-15

Country Status (1)

Country Link
JP (1) JPS62186971U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS62186971U (enrdf_load_stackoverflow)
JPS6170935U (enrdf_load_stackoverflow)
JPH0161975U (enrdf_load_stackoverflow)
JPH02118926U (enrdf_load_stackoverflow)
JPH01168551U (enrdf_load_stackoverflow)
JPH0265333U (enrdf_load_stackoverflow)
JPS612447U (ja) 真空蒸着装置
JPH02108772U (enrdf_load_stackoverflow)
JPS6211171U (enrdf_load_stackoverflow)
JPS63164862U (enrdf_load_stackoverflow)
JPS61133556U (enrdf_load_stackoverflow)
JPS6334164U (enrdf_load_stackoverflow)
JPS6215128U (enrdf_load_stackoverflow)
JPH01165622U (enrdf_load_stackoverflow)
JPS6378069U (enrdf_load_stackoverflow)
JPH01165925U (enrdf_load_stackoverflow)
JPH0211512U (enrdf_load_stackoverflow)
JPH01110871U (enrdf_load_stackoverflow)
JPS61120757U (enrdf_load_stackoverflow)
JPS58160143U (ja) アルミ蒸着フイルムのデインプル加工機
JPS61149330U (enrdf_load_stackoverflow)
JPH0478263U (enrdf_load_stackoverflow)
JPS6329930U (enrdf_load_stackoverflow)
JPS62171016U (enrdf_load_stackoverflow)
JPS63128724U (enrdf_load_stackoverflow)