JPS61112266U - - Google Patents

Info

Publication number
JPS61112266U
JPS61112266U JP19608384U JP19608384U JPS61112266U JP S61112266 U JPS61112266 U JP S61112266U JP 19608384 U JP19608384 U JP 19608384U JP 19608384 U JP19608384 U JP 19608384U JP S61112266 U JPS61112266 U JP S61112266U
Authority
JP
Japan
Prior art keywords
capillary column
silicon wafer
shaped
plate
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19608384U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19608384U priority Critical patent/JPS61112266U/ja
Publication of JPS61112266U publication Critical patent/JPS61112266U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP19608384U 1984-12-26 1984-12-26 Pending JPS61112266U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19608384U JPS61112266U (enrdf_load_stackoverflow) 1984-12-26 1984-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19608384U JPS61112266U (enrdf_load_stackoverflow) 1984-12-26 1984-12-26

Publications (1)

Publication Number Publication Date
JPS61112266U true JPS61112266U (enrdf_load_stackoverflow) 1986-07-16

Family

ID=30753727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19608384U Pending JPS61112266U (enrdf_load_stackoverflow) 1984-12-26 1984-12-26

Country Status (1)

Country Link
JP (1) JPS61112266U (enrdf_load_stackoverflow)

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