JPH0478266U - - Google Patents

Info

Publication number
JPH0478266U
JPH0478266U JP11964090U JP11964090U JPH0478266U JP H0478266 U JPH0478266 U JP H0478266U JP 11964090 U JP11964090 U JP 11964090U JP 11964090 U JP11964090 U JP 11964090U JP H0478266 U JPH0478266 U JP H0478266U
Authority
JP
Japan
Prior art keywords
substrate
cooling device
raw material
material gas
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11964090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11964090U priority Critical patent/JPH0478266U/ja
Publication of JPH0478266U publication Critical patent/JPH0478266U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11964090U 1990-11-14 1990-11-14 Pending JPH0478266U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11964090U JPH0478266U (enrdf_load_stackoverflow) 1990-11-14 1990-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11964090U JPH0478266U (enrdf_load_stackoverflow) 1990-11-14 1990-11-14

Publications (1)

Publication Number Publication Date
JPH0478266U true JPH0478266U (enrdf_load_stackoverflow) 1992-07-08

Family

ID=31867585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11964090U Pending JPH0478266U (enrdf_load_stackoverflow) 1990-11-14 1990-11-14

Country Status (1)

Country Link
JP (1) JPH0478266U (enrdf_load_stackoverflow)

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