JPH0478268U - - Google Patents

Info

Publication number
JPH0478268U
JPH0478268U JP11964190U JP11964190U JPH0478268U JP H0478268 U JPH0478268 U JP H0478268U JP 11964190 U JP11964190 U JP 11964190U JP 11964190 U JP11964190 U JP 11964190U JP H0478268 U JPH0478268 U JP H0478268U
Authority
JP
Japan
Prior art keywords
beam source
sample
strip
cooling device
band
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11964190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11964190U priority Critical patent/JPH0478268U/ja
Publication of JPH0478268U publication Critical patent/JPH0478268U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP11964190U 1990-11-14 1990-11-14 Pending JPH0478268U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11964190U JPH0478268U (enrdf_load_stackoverflow) 1990-11-14 1990-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11964190U JPH0478268U (enrdf_load_stackoverflow) 1990-11-14 1990-11-14

Publications (1)

Publication Number Publication Date
JPH0478268U true JPH0478268U (enrdf_load_stackoverflow) 1992-07-08

Family

ID=31867586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11964190U Pending JPH0478268U (enrdf_load_stackoverflow) 1990-11-14 1990-11-14

Country Status (1)

Country Link
JP (1) JPH0478268U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015029072A (ja) * 2013-06-10 2015-02-12 エフ・イ−・アイ・カンパニー 電子ビーム誘起エッチング
KR20180029261A (ko) * 2015-08-07 2018-03-20 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크. 지향성 플라즈마 및 반응성 가스를 사용하여 기판들을 처리하기 위한 장치 및 기술들

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015029072A (ja) * 2013-06-10 2015-02-12 エフ・イ−・アイ・カンパニー 電子ビーム誘起エッチング
US10304658B2 (en) 2013-06-10 2019-05-28 Fei Company Electron beam-induced etching
KR20180029261A (ko) * 2015-08-07 2018-03-20 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크. 지향성 플라즈마 및 반응성 가스를 사용하여 기판들을 처리하기 위한 장치 및 기술들
JP2018523922A (ja) * 2015-08-07 2018-08-23 ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド 方向性プラズマ及び反応性ガスを用いて基板を処理する装置及び技術

Similar Documents

Publication Publication Date Title
JPH0478268U (enrdf_load_stackoverflow)
JPH0272486U (enrdf_load_stackoverflow)
JPH0478266U (enrdf_load_stackoverflow)
JPH02115562U (enrdf_load_stackoverflow)
JPS61152815U (enrdf_load_stackoverflow)
JPS62112156U (enrdf_load_stackoverflow)
JPS6355398U (enrdf_load_stackoverflow)
JPS62147154U (enrdf_load_stackoverflow)
JPS63157939U (enrdf_load_stackoverflow)
JPS63130059U (enrdf_load_stackoverflow)
JPS6330873U (enrdf_load_stackoverflow)
JPS6331536U (enrdf_load_stackoverflow)
JPS63162753U (enrdf_load_stackoverflow)
JPS6254454U (enrdf_load_stackoverflow)
JPS6355194U (enrdf_load_stackoverflow)
JPS61126437U (enrdf_load_stackoverflow)
JPS63200198U (enrdf_load_stackoverflow)
JPS621827U (enrdf_load_stackoverflow)
JPS63128016U (enrdf_load_stackoverflow)
JPS63122926U (enrdf_load_stackoverflow)
JPH01178903U (enrdf_load_stackoverflow)
JPS61178537U (enrdf_load_stackoverflow)
JPH0397787U (enrdf_load_stackoverflow)
JPH0187266U (enrdf_load_stackoverflow)
JPH0199097U (enrdf_load_stackoverflow)