JPS6255557U - - Google Patents

Info

Publication number
JPS6255557U
JPS6255557U JP14607785U JP14607785U JPS6255557U JP S6255557 U JPS6255557 U JP S6255557U JP 14607785 U JP14607785 U JP 14607785U JP 14607785 U JP14607785 U JP 14607785U JP S6255557 U JPS6255557 U JP S6255557U
Authority
JP
Japan
Prior art keywords
wafer
locking portion
guide groove
electronic components
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14607785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248424Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985146077U priority Critical patent/JPH0248424Y2/ja
Publication of JPS6255557U publication Critical patent/JPS6255557U/ja
Application granted granted Critical
Publication of JPH0248424Y2 publication Critical patent/JPH0248424Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985146077U 1985-09-24 1985-09-24 Expired JPH0248424Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985146077U JPH0248424Y2 (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985146077U JPH0248424Y2 (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Publications (2)

Publication Number Publication Date
JPS6255557U true JPS6255557U (enrdf_load_stackoverflow) 1987-04-06
JPH0248424Y2 JPH0248424Y2 (enrdf_load_stackoverflow) 1990-12-19

Family

ID=31058208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985146077U Expired JPH0248424Y2 (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Country Status (1)

Country Link
JP (1) JPH0248424Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5360381A (en) * 1976-11-11 1978-05-30 Mitsubishi Electric Corp Planetary for vacuum evaporation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5360381A (en) * 1976-11-11 1978-05-30 Mitsubishi Electric Corp Planetary for vacuum evaporation

Also Published As

Publication number Publication date
JPH0248424Y2 (enrdf_load_stackoverflow) 1990-12-19

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