JPS6398627U - - Google Patents

Info

Publication number
JPS6398627U
JPS6398627U JP19498486U JP19498486U JPS6398627U JP S6398627 U JPS6398627 U JP S6398627U JP 19498486 U JP19498486 U JP 19498486U JP 19498486 U JP19498486 U JP 19498486U JP S6398627 U JPS6398627 U JP S6398627U
Authority
JP
Japan
Prior art keywords
wafers
wafer
predetermined number
manufacturing
quartz boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19498486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19498486U priority Critical patent/JPS6398627U/ja
Publication of JPS6398627U publication Critical patent/JPS6398627U/ja
Pending legal-status Critical Current

Links

JP19498486U 1986-12-17 1986-12-17 Pending JPS6398627U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19498486U JPS6398627U (enrdf_load_stackoverflow) 1986-12-17 1986-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19498486U JPS6398627U (enrdf_load_stackoverflow) 1986-12-17 1986-12-17

Publications (1)

Publication Number Publication Date
JPS6398627U true JPS6398627U (enrdf_load_stackoverflow) 1988-06-25

Family

ID=31152463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19498486U Pending JPS6398627U (enrdf_load_stackoverflow) 1986-12-17 1986-12-17

Country Status (1)

Country Link
JP (1) JPS6398627U (enrdf_load_stackoverflow)

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