JPS6255558U - - Google Patents

Info

Publication number
JPS6255558U
JPS6255558U JP14607885U JP14607885U JPS6255558U JP S6255558 U JPS6255558 U JP S6255558U JP 14607885 U JP14607885 U JP 14607885U JP 14607885 U JP14607885 U JP 14607885U JP S6255558 U JPS6255558 U JP S6255558U
Authority
JP
Japan
Prior art keywords
rotating roller
locking piece
rotating shaft
rotating
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14607885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329321Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985146078U priority Critical patent/JPH0329321Y2/ja
Publication of JPS6255558U publication Critical patent/JPS6255558U/ja
Application granted granted Critical
Publication of JPH0329321Y2 publication Critical patent/JPH0329321Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Physical Vapour Deposition (AREA)
JP1985146078U 1985-09-24 1985-09-24 Expired JPH0329321Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985146078U JPH0329321Y2 (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985146078U JPH0329321Y2 (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Publications (2)

Publication Number Publication Date
JPS6255558U true JPS6255558U (enrdf_load_stackoverflow) 1987-04-06
JPH0329321Y2 JPH0329321Y2 (enrdf_load_stackoverflow) 1991-06-21

Family

ID=31058210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985146078U Expired JPH0329321Y2 (enrdf_load_stackoverflow) 1985-09-24 1985-09-24

Country Status (1)

Country Link
JP (1) JPH0329321Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0187157U (enrdf_load_stackoverflow) * 1987-11-26 1989-06-08

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118945U (enrdf_load_stackoverflow) * 1978-02-10 1979-08-20
JPS57143474A (en) * 1981-02-27 1982-09-04 Hitachi Ltd Revolving jig for vacuum vapor deposition device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118945U (enrdf_load_stackoverflow) * 1978-02-10 1979-08-20
JPS57143474A (en) * 1981-02-27 1982-09-04 Hitachi Ltd Revolving jig for vacuum vapor deposition device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0187157U (enrdf_load_stackoverflow) * 1987-11-26 1989-06-08

Also Published As

Publication number Publication date
JPH0329321Y2 (enrdf_load_stackoverflow) 1991-06-21

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