JPS6452231U - - Google Patents
Info
- Publication number
- JPS6452231U JPS6452231U JP14885987U JP14885987U JPS6452231U JP S6452231 U JPS6452231 U JP S6452231U JP 14885987 U JP14885987 U JP 14885987U JP 14885987 U JP14885987 U JP 14885987U JP S6452231 U JPS6452231 U JP S6452231U
- Authority
- JP
- Japan
- Prior art keywords
- table portion
- chuck table
- chuck
- support
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14885987U JPS6452231U (zh) | 1987-09-29 | 1987-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14885987U JPS6452231U (zh) | 1987-09-29 | 1987-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6452231U true JPS6452231U (zh) | 1989-03-31 |
Family
ID=31420558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14885987U Pending JPS6452231U (zh) | 1987-09-29 | 1987-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6452231U (zh) |
-
1987
- 1987-09-29 JP JP14885987U patent/JPS6452231U/ja active Pending