JPS6389248U - - Google Patents
Info
- Publication number
- JPS6389248U JPS6389248U JP18390686U JP18390686U JPS6389248U JP S6389248 U JPS6389248 U JP S6389248U JP 18390686 U JP18390686 U JP 18390686U JP 18390686 U JP18390686 U JP 18390686U JP S6389248 U JPS6389248 U JP S6389248U
- Authority
- JP
- Japan
- Prior art keywords
- base
- arm
- manufacturing jig
- semiconductor wafer
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000000630 rising effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18390686U JPS6389248U (zh) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18390686U JPS6389248U (zh) | 1986-11-28 | 1986-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389248U true JPS6389248U (zh) | 1988-06-10 |
Family
ID=31131074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18390686U Pending JPS6389248U (zh) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389248U (zh) |
-
1986
- 1986-11-28 JP JP18390686U patent/JPS6389248U/ja active Pending