JPS6426831U - - Google Patents

Info

Publication number
JPS6426831U
JPS6426831U JP12275387U JP12275387U JPS6426831U JP S6426831 U JPS6426831 U JP S6426831U JP 12275387 U JP12275387 U JP 12275387U JP 12275387 U JP12275387 U JP 12275387U JP S6426831 U JPS6426831 U JP S6426831U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
small hole
manufacturing
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12275387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12275387U priority Critical patent/JPS6426831U/ja
Publication of JPS6426831U publication Critical patent/JPS6426831U/ja
Pending legal-status Critical Current

Links

JP12275387U 1987-08-10 1987-08-10 Pending JPS6426831U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12275387U JPS6426831U (zh) 1987-08-10 1987-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12275387U JPS6426831U (zh) 1987-08-10 1987-08-10

Publications (1)

Publication Number Publication Date
JPS6426831U true JPS6426831U (zh) 1989-02-15

Family

ID=31370977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12275387U Pending JPS6426831U (zh) 1987-08-10 1987-08-10

Country Status (1)

Country Link
JP (1) JPS6426831U (zh)

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