JPH0391656U - - Google Patents
Info
- Publication number
- JPH0391656U JPH0391656U JP15154489U JP15154489U JPH0391656U JP H0391656 U JPH0391656 U JP H0391656U JP 15154489 U JP15154489 U JP 15154489U JP 15154489 U JP15154489 U JP 15154489U JP H0391656 U JPH0391656 U JP H0391656U
- Authority
- JP
- Japan
- Prior art keywords
- rotating body
- wafer
- rotation jig
- mounting rotation
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15154489U JPH0391656U (zh) | 1989-12-27 | 1989-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15154489U JPH0391656U (zh) | 1989-12-27 | 1989-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0391656U true JPH0391656U (zh) | 1991-09-18 |
Family
ID=31697839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15154489U Pending JPH0391656U (zh) | 1989-12-27 | 1989-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0391656U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009028065A1 (ja) * | 2007-08-30 | 2009-03-05 | Fujitsu Microelectronics Limited | イオン注入装置、基板クランプ機構、及びイオン注入方法 |
-
1989
- 1989-12-27 JP JP15154489U patent/JPH0391656U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009028065A1 (ja) * | 2007-08-30 | 2009-03-05 | Fujitsu Microelectronics Limited | イオン注入装置、基板クランプ機構、及びイオン注入方法 |
| US8063388B2 (en) | 2007-08-30 | 2011-11-22 | Fujitsu Semiconductor Limited | Ion implantation apparatus, substrate clamping mechanism, and ion implantation method |