JPS6451845U - - Google Patents
Info
- Publication number
- JPS6451845U JPS6451845U JP14791587U JP14791587U JPS6451845U JP S6451845 U JPS6451845 U JP S6451845U JP 14791587 U JP14791587 U JP 14791587U JP 14791587 U JP14791587 U JP 14791587U JP S6451845 U JPS6451845 U JP S6451845U
- Authority
- JP
- Japan
- Prior art keywords
- recess
- silicon substrate
- strain
- glass layer
- sensor chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
- 229910052710 silicon Inorganic materials 0.000 claims 3
- 239000010703 silicon Substances 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14791587U JPS6451845U (ru) | 1987-09-28 | 1987-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14791587U JPS6451845U (ru) | 1987-09-28 | 1987-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6451845U true JPS6451845U (ru) | 1989-03-30 |
Family
ID=31418764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14791587U Pending JPS6451845U (ru) | 1987-09-28 | 1987-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6451845U (ru) |
-
1987
- 1987-09-28 JP JP14791587U patent/JPS6451845U/ja active Pending