JPH01116440U - - Google Patents
Info
- Publication number
- JPH01116440U JPH01116440U JP1050988U JP1050988U JPH01116440U JP H01116440 U JPH01116440 U JP H01116440U JP 1050988 U JP1050988 U JP 1050988U JP 1050988 U JP1050988 U JP 1050988U JP H01116440 U JPH01116440 U JP H01116440U
- Authority
- JP
- Japan
- Prior art keywords
- check pattern
- semiconductor substrate
- pattern
- letter
- recessed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 2
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1050988U JPH01116440U (ru) | 1988-01-30 | 1988-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1050988U JPH01116440U (ru) | 1988-01-30 | 1988-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01116440U true JPH01116440U (ru) | 1989-08-07 |
Family
ID=31218237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1050988U Pending JPH01116440U (ru) | 1988-01-30 | 1988-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01116440U (ru) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4719991B2 (ja) * | 2001-03-12 | 2011-07-06 | 株式会社デンソー | 炭化珪素半導体装置の製造方法 |
| JP2019102550A (ja) * | 2017-11-29 | 2019-06-24 | トヨタ自動車株式会社 | 半導体基板の製造方法 |
-
1988
- 1988-01-30 JP JP1050988U patent/JPH01116440U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4719991B2 (ja) * | 2001-03-12 | 2011-07-06 | 株式会社デンソー | 炭化珪素半導体装置の製造方法 |
| JP2019102550A (ja) * | 2017-11-29 | 2019-06-24 | トヨタ自動車株式会社 | 半導体基板の製造方法 |