JPH0184041U - - Google Patents

Info

Publication number

JPH0184041U

JPH0184041U JP1987178594U JP17859487U JPH0184041U JP H0184041 U JPH0184041 U JP H0184041U JP 1987178594 U JP1987178594 U JP 1987178594U JP 17859487 U JP17859487 U JP 17859487U JP H0184041 U JPH0184041 U JP H0184041U

Authority

JP

Japan

Prior art keywords

pressure

glass substrate

concave part

measurement pressure

diaphragm

Prior art date

1987-11-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000000758 substrate Substances 0.000 claims description 4
• 239000011521 glass Substances 0.000 claims description 3
• 239000002184 metal Substances 0.000 claims description 2
• 239000010409 thin film Substances 0.000 claims description 2
• 238000005259 measurement Methods 0.000 claims 2
• 230000015572 biosynthetic process Effects 0.000 claims 1
• 239000004020 conductor Substances 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 description 4
• 238000010586 diagram Methods 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1