JPH0197232U - - Google Patents
Info
- Publication number
- JPH0197232U JPH0197232U JP19365787U JP19365787U JPH0197232U JP H0197232 U JPH0197232 U JP H0197232U JP 19365787 U JP19365787 U JP 19365787U JP 19365787 U JP19365787 U JP 19365787U JP H0197232 U JPH0197232 U JP H0197232U
- Authority
- JP
- Japan
- Prior art keywords
- thin
- generating portion
- strain
- pressure
- sensor chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19365787U JPH0197232U (ru) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19365787U JPH0197232U (ru) | 1987-12-21 | 1987-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0197232U true JPH0197232U (ru) | 1989-06-28 |
Family
ID=31484438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19365787U Pending JPH0197232U (ru) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0197232U (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007057491A (ja) * | 2005-08-26 | 2007-03-08 | Tokai Rika Co Ltd | センサ装置 |
-
1987
- 1987-12-21 JP JP19365787U patent/JPH0197232U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007057491A (ja) * | 2005-08-26 | 2007-03-08 | Tokai Rika Co Ltd | センサ装置 |
| JP4574496B2 (ja) * | 2005-08-26 | 2010-11-04 | 株式会社東海理化電機製作所 | センサ装置 |