JPS6367267U - - Google Patents
Info
- Publication number
- JPS6367267U JPS6367267U JP16256586U JP16256586U JPS6367267U JP S6367267 U JPS6367267 U JP S6367267U JP 16256586 U JP16256586 U JP 16256586U JP 16256586 U JP16256586 U JP 16256586U JP S6367267 U JPS6367267 U JP S6367267U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- base
- semiconductor
- sensor chip
- joint
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16256586U JPS6367267U (ru) | 1986-10-23 | 1986-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16256586U JPS6367267U (ru) | 1986-10-23 | 1986-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367267U true JPS6367267U (ru) | 1988-05-06 |
Family
ID=31089947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16256586U Pending JPS6367267U (ru) | 1986-10-23 | 1986-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367267U (ru) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013167468A (ja) * | 2012-02-14 | 2013-08-29 | Alps Electric Co Ltd | 圧力センサとその製造方法 |
| JP2014134427A (ja) * | 2013-01-09 | 2014-07-24 | Denso Corp | 物理量センサおよびその製造方法 |
-
1986
- 1986-10-23 JP JP16256586U patent/JPS6367267U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013167468A (ja) * | 2012-02-14 | 2013-08-29 | Alps Electric Co Ltd | 圧力センサとその製造方法 |
| JP2014134427A (ja) * | 2013-01-09 | 2014-07-24 | Denso Corp | 物理量センサおよびその製造方法 |