JPH01105839U - - Google Patents

Info

Publication number

JPH01105839U

JPH01105839U JP120788U JP120788U JPH01105839U JP H01105839 U JPH01105839 U JP H01105839U JP 120788 U JP120788 U JP 120788U JP 120788 U JP120788 U JP 120788U JP H01105839 U JPH01105839 U JP H01105839U

Authority

JP

Japan

Prior art keywords

detection section

pressure detection

static pressure

semiconductor silicon

silicon substrate

Prior art date

1988-01-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 238000001514 detection method Methods 0.000 claims description 8
• 239000004065 semiconductor Substances 0.000 claims description 7
• 230000003068 static effect Effects 0.000 claims description 5
• 239000011521 glass Substances 0.000 claims description 3
• 239000000919 ceramic Substances 0.000 claims description 2
• 239000002131 composite material Substances 0.000 claims description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
• 229910052710 silicon Inorganic materials 0.000 claims 4
• 239000010703 silicon Substances 0.000 claims 4
• 239000000758 substrate Substances 0.000 claims 4
• RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
• 239000005297 pyrex Substances 0.000 description 1

Cited By (1)