JPS645093Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a vacuum evacuation device used for efficiently extracting air from workpieces that require vacuum sealing, such as tubes and mahobins.

Conventionally, as shown in FIG. 1, as this type of vacuum evacuation device, a plurality of exhaust manifolds 1 each having a large number of gas inlets 1a are provided in parallel, and the gas from each of these exhaust manifolds 1 is An exhaust system 5 including an oil diffusion pump 2, a mechanical boost pump 3, an oil rotary vacuum pump 4, etc. interposed in series is connected to the outlet 1b through different valves 6. However, this thing is
Each gas inlet 1a of each exhaust manifold 1...
Attach a workpiece 7 such as a tube to each via a tip tube 8, open all valves 6 corresponding to the manifold 1 in use, and then turn on each pump 2,
3 and 4 are operated to evacuate the inside of the workpiece 7, and while the evacuation operation continues, each workpiece is sequentially tip-off (cutting with the middle part of the tip tube airtightly sealed). ).

However, with this kind of equipment, if even one workpiece fails to chip off, outside air will enter all the workpieces that have not yet been chipped off, and a chipoff failure will result in all remaining workpieces being defective. There is a serious problem of storage.

Therefore, in order to solve this problem, the valve 6 is selectively closed after the air has been extracted, and the tip-off is performed independently for each exhaust manifold 1, thereby preventing the tip-off failure. There is also a device that can prevent the leakage from spreading to the workpieces 7 attached to other exhaust manifolds 1.

However, when such a device is used, even if there is no chip-off failure, if a large number of works 7 are attached to each exhaust manifold 1, gases released within the works 7 and leaks at various connections may occur. As a result, the degree of vacuum decreases as the workpiece 7 is chipped off last in each exhaust manifold 1 . This causes a new problem in that it is difficult to obtain a product with a uniform degree of vacuum.

The present invention was developed in view of these circumstances, and it operates independently for each exhaust manifold by appropriately opening and closing the main valve interposed between each exhaust manifold and a single main exhaust system path. To enable tip-off work of a workpiece to be carried out by closing the main valve and continue to evacuate the gas in the exhaust manifold during chip-off through a single auxiliary exhaust system path independent from the main exhaust system path. By configuring the structure so that it is possible to do this, it not only minimizes the effects of a failure during chipping off on other workpieces, but also ensures that the degree of vacuum of all the workpieces being chipped off is uniform and appropriate to prevent defective products. To provide a vacuum evacuation device that can prevent the occurrence of .

An embodiment of the present invention will be described below with reference to FIG. Note that the same parts as in the conventional example shown in FIG. 1 are given the same symbols, and the explanation will be omitted.

A device similar to that shown in FIG. 1 is provided with an auxiliary exhaust line 9 independent of the main exhaust line 5.
The auxiliary exhaust system line 9 is a main pipe line 13 formed by interposing an oil diffusion pump 11 and an oil rotary vacuum pump 12 in series.
A number of branch pipes 14 corresponding to the number of exhaust manifolds 1 are branched from the starting end of the exhaust manifold 1, and the tips of these branch pipes 14 are connected to each of the exhaust manifolds 1 through different sub-valves 15. Gas outlet 1b
...is connected to each other. Note 16
is a vacuum gauge.

Next, the operation of this device will be explained.

First, as mentioned above, each exhaust manifold 1
Attach the tips of the tip tubes 8 of the workpieces 7, such as tubes, to each gas inlet 1a of the Each of the pumps 2, 3, 4 of 5 is operated to evacuate the inside of each work 7. At this time, the sub-valves 15 may also be fully opened to operate the pumps 11 and 12 of the auxiliary exhaust system 9, thereby causing the two exhaust systems 5 and 9 to work together. When the evacuation of the work 7 is completed in this way, the next step is to move on to the tip-off operation. That is, for example, 1
Workpiece 7 attached to exhaust manifold 1 in row...
When performing tip-off from
(leave the sub-valves 15 in other rows closed), close the main valve 6 in the first row (leave the main valves 6 in other rows open), and in this state open the manifold in the first row. Work 7 of 1 is chipped off in sequence. When all the tip-offs for the first row are completed, then open the sub-valves 15 for the second row (sub-valves 15 for the third row and beyond...
Keep it closed. It is recommended that the sub-valve 15 in the first row be closed for safety reasons), as well as the main valve 6 in the second row (leave the main valves 6 in the third and subsequent rows open), and in this state, close the main valve 6 in the second row. Workpiece 7 of manifold 1 is chipped off in sequence. By performing this operation sequentially for each row, all exhaust manifolds 1
It is possible to chip off the workpiece 7 attached to....

Therefore, if this kind of device is used, it is possible to easily solve the problems peculiar to a vacuum evacuation system that performs tip-off work while evacuating a plurality of exhaust manifolds 1 through a single main exhaust system path 5. This problem can be reliably solved by a suitable configuration. That is, this device includes main valves 6 and sub-valves that are connected to a plurality of exhaust manifolds 1, a single main exhaust line 5, and a single auxiliary exhaust line 9 during chip-off work. 15
It has a simple configuration in which it connects via ..., and with this configuration, if chip-off fails, all work 7 that has not been chip-off
It is possible to effectively prevent the occurrence of problems such as outside air intruding into the interior of the workpiece 7, or problems such as the degree of vacuum decreasing as the tip-off occurs last in workpiece 7.

It should be noted that the present invention is of course not limited to that of the embodiment described above, and for example, in addition to the structure of the embodiment described above, all the gas inlets 1 of each exhaust manifold 1 are
A normally open safety valve (not shown) such as a solenoid valve is installed in section a, and a pressure alarm contact is installed on the vacuum gauge 16 of the auxiliary exhaust system 9. The safety valve may be immediately closed when the degree of vacuum inside becomes worse than a set value. In this way, it becomes possible to limit the loss of workpieces due to a failure in tip-off to only those that fail in tip-off.

As explained above, the present invention is capable of chipping off workpieces independently for each exhaust manifold by opening and closing the main valve interposed between each exhaust manifold and the main exhaust system path. Therefore, even if tip-off fails and outside air intrudes into the exhaust manifold, the effect of outside air intrusion will spread to other exhaust manifolds where workpiece tip-off has not been done. can be prevented. Therefore, damage to other workpieces due to failure during tip-off of the workpiece can be minimized.
In addition, the main valve is closed and the gas in the exhaust manifold during chip-off can be continuously evacuated through the auxiliary exhaust system, which is independent from the main exhaust system, so the gas in the exhaust manifold can be continuously evacuated during chip-off. There is no inconvenience that the degree of vacuum inside gradually decreases. Therefore, it is possible to provide a vacuum evacuation device that can maintain a uniform and appropriate degree of vacuum for all workpieces and prevent the production of defective products as much as possible.

Moreover, the device of the present invention connects a single main exhaust system path and a single auxiliary exhaust system path to a plurality of exhaust manifolds via a main valve and a sub-valve that are switched in connection with tip-off work. Therefore, the above-mentioned object can be reliably achieved with a simple configuration with a small number of parts.

[Brief explanation of drawings]

FIG. 1 is an explanatory circuit diagram showing a conventional example, and FIG. 2 is an explanatory circuit diagram showing an embodiment of the present invention. 1... Exhaust manifold, 1a... Gas inlet, 1b... Gas outlet, 5... Main exhaust system path, 6
... Main valve, 7 ... Work, 8 ... Chip pipe, 9 ... Auxiliary exhaust system path, 15 ... Sub valve.

Claims (1)

[Scope of utility model registration request] A plurality of exhaust manifolds each having a large number of gas inlets are used to connect the end of the tip tube of the workpiece to be vacuum pumped, and the gas outlet of each of these exhaust manifolds is closed separately during tip-off work. A single main exhaust system line that is connected through a main valve that is opened and sequentially exhausts the gas in the exhaust manifold to the outside corresponding to the main valve that is open, and a gas outlet of each exhaust manifold at least during the tip-off operation. A vacuum evacuation system characterized by comprising a single auxiliary exhaust system line that is connected through each sub-valve that is opened and sequentially exhausts the gas in the exhaust manifold to the outside that corresponds to the sub-valves that are opened. Device.