JPS58145378A - Evacuation system of electron beam welding machine - Google Patents
Evacuation system of electron beam welding machineInfo
- Publication number
- JPS58145378A JPS58145378A JP2941782A JP2941782A JPS58145378A JP S58145378 A JPS58145378 A JP S58145378A JP 2941782 A JP2941782 A JP 2941782A JP 2941782 A JP2941782 A JP 2941782A JP S58145378 A JPS58145378 A JP S58145378A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- mechanical booster
- vacuum
- booster pump
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は、２ステーシヨン、４ステーシヨン等のサイ
クルタイムの短かい多源生産型の電子ビーム溶接−の真
空排気システムに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum evacuation system for electron beam welding of a multi-source production type with a short cycle time, such as a 2-station or 4-station system.
第１図は従来の電子ビーム溶接機の真空排気システムを
示す系統図であり、図において（１１は被溶接物（ｉＪ
示せず）を収納する溶接室、 （２） 、 ＋３）はそ
れぞれ溶接室（１）を真空排気するメカニカルブースタ
ポンプと油回転ポンプである。（４）は上記溶接室＋１
１とメカニカルブースタポンプ（旬間の管路（５）を開
閉するための真空バルブ、（６）は上記メカニカルブー
スタポンプ（２）の駆動開始圧力（数１ｏ Ｔｏｒｒ
）を検出するための真空スイッチ、（７）は溶接室（ｌ
目ζ空気を流入するためのリークバルブである。Fig. 1 is a system diagram showing the evacuation system of a conventional electron beam welding machine.
(not shown), and (2) and +3) are a mechanical booster pump and an oil rotary pump that evacuate the welding chamber (1), respectively. (4) is the above welding room +1
1 and the mechanical booster pump (vacuum valve for opening and closing the pipe line (5), (6) is the driving start pressure (several 1 torr) of the mechanical booster pump (2).
), (7) is a vacuum switch for detecting the welding room (l
This is a leak valve for letting air in.
従来の真空排気システムは上記のように構成され、その
動作は、真空バルブ（４）を閉じ１次に油回転ポンプ（
３）を動作させて真空バルブ（４）と油回転ポンプ（３
）間を真空排気していく。するとメカニカルブースタポ
ンプ（２）の駆動開始圧力（数１０ Ｔｏｒｒ ）まで
真空排気され真空スイッチ（６）が作動する。こノ真空
スイッチ（６）の動作によりメカニカルブースタポンプ
（２）が動作する。その状態で溶接室１１）内に被溶接
物（図示せず）がセットされるまで待機することになる
。セットが完了すると溶接室扉図示せず）を閉じ、真空
バルブ（４）を開いて溶接室ｆｉｌ内を真空排気する。The conventional vacuum evacuation system is configured as described above, and its operation is as follows: first, the vacuum valve (4) is closed, and then the oil rotary pump (
3) to operate the vacuum valve (4) and oil rotary pump (3).
) and evacuate the space between them. Then, the vacuum is evacuated to the driving start pressure (several 10 Torr) of the mechanical booster pump (2), and the vacuum switch (6) is activated. The mechanical booster pump (2) is operated by the operation of the vacuum switch (6). In this state, the welding chamber 11) waits until a workpiece (not shown) is set in the welding chamber 11). When the setting is completed, the welding chamber door (not shown) is closed and the vacuum valve (4) is opened to evacuate the inside of the welding chamber fil.
溶接室（１）内が所定の圧力まで真空排気が完了すると
ｄ子ビーム（図示せず）を照射し溶接する。When the inside of the welding chamber (1) has been evacuated to a predetermined pressure, a d-son beam (not shown) is irradiated to perform welding.
溶接が完了すると真空バルブ（４）を閉じる。When welding is completed, close the vacuum valve (4).
次にリークバルブ（７）を開いて溶接室Ｈｌ内に空気を
４人させる。流入が完了するとリークバルブ（７）を閉
じ、溶接４扉（図示せず）を開いて被溶接物（図示せず
）を溶接室＋１）から取り出す。次に別の被電接物（図
示せず）を溶接室（１）内にセットするようになってい
る。Next, open the leak valve (7) to let air into the welding chamber Hl. When the inflow is completed, the leak valve (7) is closed, the welding door 4 (not shown) is opened, and the workpiece to be welded (not shown) is taken out from the welding chamber +1). Next, another electrically connected object (not shown) is set in the welding chamber (1).
上記の工程で真空バルブ（４）を開いた時、溶接室（１
）内の空気（圧カフ６０ Ｔｏｒｒ）が多量にメカニカ
ルブースタポンプ（２）の吸込口に流入することになる
。When the vacuum valve (4) is opened in the above process, the welding chamber (1)
) (pressure cuff 60 Torr) will flow into the suction port of the mechanical booster pump (2) in large quantities.
その流入空気によりメカニカルブースタポンプ（２）
（７）吸込側の圧力が数秒間メカニカルブースタポンプ
（２）の駆動開始圧力（数１ｏ Ｔｏｒｒ ）以上にな
りメカニカルブースタポンプ（２）が過負荷の状態にな
る。その過負荷によりメカニカルブースタポンプ（２ン
の駆動用モータ′（図示せず）の異常発熱による焼損、
メカニカルブースタポンプ（２）の回転軸（図示せず）
の破損、疲労破壊等の原因となり安定かつ長時間連続運
転できないという欠点があった。The inflow air causes mechanical booster pump (2)
(7) The pressure on the suction side becomes higher than the driving start pressure (several 10 Torr) of the mechanical booster pump (2) for several seconds, and the mechanical booster pump (2) becomes overloaded. The overload caused the mechanical booster pump (2-inch drive motor' (not shown) to burn out due to abnormal heat generation,
Rotating shaft of mechanical booster pump (2) (not shown)
The drawback was that it could not be operated stably and continuously for long periods of time due to damage such as fatigue failure.
この発明は、上記のような従来のもの＼欠点を除去する
ためになされたもので、溶接室と真空バルブとの間に分
路を設け、この分路を通して、あらかじめメカニカルブ
ースタポンプの運転圧力まで真空引きして後メカニカル
ブースタポンプに運転を移すことによって、メカニカル
ブースタポンプに過負荷をかけない装置を提供すること
を目的としている。This invention was made in order to eliminate the drawbacks of the conventional ones as described above. A shunt is provided between the welding chamber and the vacuum valve, and through this shunt, the operating pressure of the mechanical booster pump is supplied in advance. The purpose of the present invention is to provide a device that does not overload the mechanical booster pump by evacuation and then transferring operation to the mechanical booster pump.
第２図はこの発明の一実施例を示す真空排気システムの
系統図であり、（ｌ）〜（７）は従来装置と全く同一で
ある。FIG. 2 is a system diagram of a vacuum evacuation system showing an embodiment of the present invention, and (l) to (7) are completely the same as the conventional device.
（８）は溶接室（１）と真空バルブ（４）の間の管路（
５）とメカニカルブースタポンプ（２）と油回転ポンプ
（３）の聞の管路（６）を連結する分路であり、（９）
は分路（８）に設けられた第２の真空バルブである◎
上記のように構成された真空排気システムでは。(8) is the pipe line (
5), the mechanical booster pump (2), and the oil rotary pump (3).
is the second vacuum valve provided in the shunt (8) ◎ In the vacuum evacuation system configured as above.
溶接室口）内に被溶接物（図示せず）をセットしている
間に真空バルブ（４）と第２の真空バルブ（９）を閉じ
ておき、油回転ポンプ（３）を動作させ油回転ポンプ（
３）と真空バルブ（４）および第２の真空バルブ（９）
との間を真空排気する。その真空排気によりそれらの間
がメカニカルブースタポンプ（！）の駆動開始圧力（数
１０ Ｔｏｒｒ ）以下になり真空スイッチ（６）が作
動するとメカニカルブースタポンプ（２）が動作する。While the work to be welded (not shown) is set in the welding chamber (opening of the welding chamber), the vacuum valve (4) and the second vacuum valve (9) are closed, and the oil rotary pump (3) is operated to pump out the oil. Rotary pump (
3) and vacuum valve (4) and second vacuum valve (9)
Evacuate the space between the Due to the evacuation, the pressure between them becomes lower than the driving start pressure (several 10 Torr) of the mechanical booster pump (!), and when the vacuum switch (6) is activated, the mechanical booster pump (2) is activated.
そのうちに被溶接物（図示せず）のセットが完了する。In the meantime, the setting of the objects to be welded (not shown) is completed.
セットが完了すると溶接室扉）（図示せず）を閉じ、第
２の真空バルブ（９）を開き溶接室１１）を分路（８）
から真空排気する。分路（８）の内圧がメカニカルブー
スタポンプ（２）の駆動開始圧力になると同時に第２の
真空バルブ（−）を閉じ真空パルプ（４）を開いて溶接
室（１）を真空排気する。よって溶接室口）内の多電の
空気は、第２の真空バルブ（９）を開くと同時に分路（
８）の管路容積によって減圧され、しかも油回転ポンプ
（３）によって真空排気されるので溶接室１１１内の圧
力は絢時にメカニカルブースタポンプ（２）のＭｆｌＪ
Ｊ開始圧力以下となりほとんど排気時間に影υを与えな
い。しかもメカニカルブースタポンプ（２）の駆動開始
圧力以下で真空バルブ（４）を開くのでメカニカルブー
スタポンプ（２）に過負荷を与えることなく安定した長
時間連続運転が可能な真空排気システムを得ることがで
きる。When the set is completed, close the welding chamber door (not shown) and open the second vacuum valve (9) to divert the welding chamber 11) to the shunt (8).
Evacuate from. At the same time that the internal pressure of the shunt (8) reaches the driving start pressure of the mechanical booster pump (2), the second vacuum valve (-) is closed, the vacuum pulp (4) is opened, and the welding chamber (1) is evacuated. Therefore, the highly energized air inside the welding chamber entrance is shunted at the same time as the second vacuum valve (9) is opened.
8), and is evacuated by the oil rotary pump (3), so the pressure inside the welding chamber 111 is reduced to MflJ of the mechanical booster pump (2).
The pressure is below J starting pressure and has almost no effect on the exhaust time υ. Moreover, since the vacuum valve (4) is opened at a pressure lower than the drive start pressure of the mechanical booster pump (2), it is possible to obtain a vacuum exhaust system that can operate stably and continuously for a long time without overloading the mechanical booster pump (2). can.
なお上記実施例では、管路（５）と分路（８）の真空排
気に同じ油回転ポンプ（３）を使用したが第８図のよう
に分路専用に第２の油回転ポンプ（Ｉｔ）を備えても同
様の効果が期待できる。In the above embodiment, the same oil rotary pump (3) was used for evacuation of the pipe line (5) and the shunt line (8), but as shown in Fig. 8, a second oil rotary pump (It ), similar effects can be expected.
この発明は以上説明したとうり、溶接室と真空バルブの
間に分路を取り付け、その分路を通して溶接室を真空に
引き、しかる後にメカニカルブースタポンプの運転に移
すことにより、メカニカルブースタポンプの過負荷を防
止し安定かつ長時間連続運転できるという効果がある。As explained above, this invention installs a shunt between the welding chamber and the vacuum valve, evacuates the welding chamber through the shunt, and then shifts the operation of the mechanical booster pump, thereby overheating the mechanical booster pump. It has the effect of preventing load and allowing stable and continuous operation for long periods of time.
第１図は従来の電子ビーム溶接機真空排気システムを示
す系統図、第２図および第８図はこの発明の各実施例を
示す電子ビーム溶接機真空排気システムの系統図である
。
図において＋１）は溶接室、（２）はメカニカルブース
タポンプ、（３）は油回転ポンプ、（４）は真空バルブ
、（８）は分路、（９）は第２の真空バルブ、叫は第２
の油回転ポンプである。
なお図中同一符号は同一または相当部分を示す。
代理人 葛 野 信 −
第１図
第２図
第３図FIG. 1 is a system diagram showing a conventional electron beam welding machine evacuation system, and FIGS. 2 and 8 are system diagrams of electron beam welding machine vacuum evacuation systems showing each embodiment of the present invention. In the figure, +1) is the welding room, (2) is the mechanical booster pump, (3) is the oil rotary pump, (4) is the vacuum valve, (8) is the shunt, (9) is the second vacuum valve, and Second
This is an oil rotary pump. Note that the same reference numerals in the figures indicate the same or corresponding parts. Agent Shin Kuzuno - Figure 1 Figure 2 Figure 3
Claims (1)
バルブとメカニカルブースタポンプと油回転ポンプ、お
よび上記溶接室と上記真空バルブの間に設けられ、上記
メカニカルブースタポンプによる真空引きに先立って上
記溶接室を真空引きする分路を備えた電子ビーム溶接機
真空排気システム。 （２）分路はメカニカルブースタポンプと油回転ポンプ
の間に接続され、第２の真空バルブを備えたことを特徴
とする特許請求の範囲第１項記載の電子ビーム溶接機真
空排気システム。 （３）分路は第２の真空バルブと第２の油回転ポンプを
備えたことを特徴とする特許請求の範囲第１項記載の電
子ビーム溶接機真空排気システム。[Claims] (11) A welding chamber that houses the workpiece and is evacuated. A vacuum valve, a mechanical booster pump, and an oil rotary pump connected in series to evacuate this welding chamber, and the above-mentioned welding chamber. An electron beam welding machine vacuum evacuation system provided between the chamber and the vacuum valve, and equipped with a shunt that evacuates the welding chamber prior to evacuation by the mechanical booster pump. (2) The shunt is a mechanical booster pump. The electron beam welding machine vacuum evacuation system according to claim 1, further comprising a second vacuum valve connected between the pump and the oil rotary pump. An electron beam welding machine vacuum evacuation system according to claim 1, characterized by comprising a valve and a second oil rotary pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2941782A JPS58145378A (en) | 1982-02-23 | 1982-02-23 | Evacuation system of electron beam welding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2941782A JPS58145378A (en) | 1982-02-23 | 1982-02-23 | Evacuation system of electron beam welding machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58145378A true JPS58145378A (en) | 1983-08-30 |
Family
ID=12275547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2941782A Pending JPS58145378A (en) | 1982-02-23 | 1982-02-23 | Evacuation system of electron beam welding machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58145378A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011036896A (en) * | 2009-08-17 | 2011-02-24 | Mitsubishi Heavy Ind Ltd | Electron beam welding equipment |
| CN103433650A (en) * | 2013-07-18 | 2013-12-11 | 杭州博数土木工程技术有限公司 | Absorption-type vacuum welding equipment and process |
-
1982
- 1982-02-23 JP JP2941782A patent/JPS58145378A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011036896A (en) * | 2009-08-17 | 2011-02-24 | Mitsubishi Heavy Ind Ltd | Electron beam welding equipment |
| CN103433650A (en) * | 2013-07-18 | 2013-12-11 | 杭州博数土木工程技术有限公司 | Absorption-type vacuum welding equipment and process |
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