JPS5823514B2 - Vacuum pump equipment in vacuum heat treatment furnace - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum pump device for a vacuum heat treatment furnace.

Conventionally, in all vacuum heat treatment furnaces including ion nitriding furnaces, the furnace bodies have become larger, so in order to further shorten the evacuation time during the work process and improve efficiency, for example, roots type vacuum pumps etc. have been used. A mechanical booster pump is used in combination with a regular rotary pump such as a vane pump.

As shown in FIG. 1, mechanical booster pumps 31, 32 and rotary pumps 41, 4□ are directly connected to the two furnace bodies 11, 1□ via valves 2, respectively. A strainer 5 is interposed between each of the terminals 12 and 2.

In this way, the mechanical booster pumps 31, 3□ and the rotary pump 4 are individually connected to the furnace bodies 17, 1□.
Since 1,4□ is installed, it requires installation space and is expensive.

Also, when using the mechanical booster pumps 31, 32
There is almost no risk of failure, but rotary pump 4
1 and 42 are prone to failure, and in that case, the furnace bodies 11 and 1□ of the failed series were completely idle, impairing workability.

For example, if one of the rotary pumps 41 breaks down, the processing of that furnace body 11 cannot be continued regardless of whether the processing is in progress or not.

Installing a backup pump as a countermeasure to this problem would be very costly, and it would also take a considerable amount of time to replace the pump, resulting in extremely poor equipment operating efficiency.

The present invention has been made in view of the above circumstances, and its purpose is to provide a plurality of furnace bodies, a device directly connected to these furnace bodies,
and the same number of rotary pumps and one mechanical booster pump connected in parallel between the furnace body and the rotary pump, and the furnace body, rotary pump, and mechanical booster pump are each connected to each other via pulp. The object of the present invention is to provide a vacuum pump device for a vacuum heat treatment furnace that can efficiently operate the furnace body.

Hereinafter, the present invention will be described in detail with reference to illustrated embodiments.

FIG. 2 is a block diagram of the present invention in which the same parts as in FIG.

Reference numerals 41 and 42 denote rotary pumps that are directly connected to the furnace bodies 10 and 1□, and use ordinary rotary pumps such as vane pumps.

The above furnace body 1. ．． 1□ and rotary pump 4□, 4
A strainer 5 is installed in each of the pipes 61 and 6□ connecting the two.
and pulp 23 and 24 are interposed in series.

Reference numeral 3 denotes a mechanical booster pump commonly connected in parallel to the valves 23 and 24 through pipes 6s and 64, and this mechanical booster pump 3 pumps the pulp 23 and 24 through separate valves 27 and 2H25+2e, respectively.
It is connected to both sides of 24.

Now, in a normal operating state, for example, if the furnace body 11 opens the pulps 21 and 25 and uses the rotary pump 41 and the mechanical booster pump 3, the furnace body 1□ opens the pulp 2 and uses the rotary pump. 42 alone performs vacuuming.

At this time, the pulps 2□, 26, and 23 are closed.

When the treatment of the furnace body 11 is completed, the pulp 21°2
5.2. is closed, the pulps 22 and 26 are opened, and the furnace body 12 enters processing using the rotary pump 42 and the mechanical booster pump 3.

On the other hand, the furnace body 11 takes out the processed workpiece, sets a new workpiece, and then opens the pulp 23 to perform vacuuming.

At this time, pulp 21.2. , 24 are closed.

However, in the unlikely event that the rotary pump 4. If pulp 24.25 fails, immediately close pulp 2. , la 26.

As a result, the furnace body 1. Pulp 21-Mechanical booth coupon 7” 3-Hartz 26-Rotary pump 4□
This circuit is formed and the process can be continued without delay.

If rotary pump 4□ breaks down, do the same thing.
Processing can be continued by closing pulps 23° and 26 and opening pulps 2□ and 25.

As detailed above, according to the present invention, since the mechanical booster pump is shared by multiple furnace bodies, the installation space can be reduced, and if any of the rotary pumps breaks down, it can be quickly replaced. This greatly improves work efficiency.

In addition, there is no need to prepare a pedestal for each furnace body, and the furnace can be assembled into a single pedestal, making maintenance easier.

It should be noted that the present invention is not limited to the above-mentioned embodiments, but by using pulp as a solenoid valve and creating a sequence based on a time chart, it is possible to freely use a plurality of furnace bodies simply by operating a switch.

[Brief explanation of the drawing]

FIG. 1 is a conceptual diagram showing a vacuum pump device in a conventional vacuum heat treatment furnace, and FIG. 2 is a conceptual diagram showing a vacuum pump device in a vacuum heat treatment furnace according to an embodiment of the present invention. 11.1□...Furnace body, 2,2. ~26...
... Pulp, 3 ... Mechanical booster pump, 48, 4□ ... Rotary pump, 6. ~
64... Conduit.

Claims (1)

[Claims] 1. A system comprising: a plurality of furnace bodies, the same number of rotary pumps that are directly connected to these furnace bodies, and one mechanical booster pump that is connected in parallel between the furnace bodies and the rotary pumps. , wherein the furnace body, the rotary pump, and the mechanical booster pump are each connected to each other via a pulp. Empty pump equipment.