JPS6450350A - Control device for electron microscope - Google Patents

Control device for electron microscope

Info

Publication number
JPS6450350A
JPS6450350A JP62205858A JP20585887A JPS6450350A JP S6450350 A JPS6450350 A JP S6450350A JP 62205858 A JP62205858 A JP 62205858A JP 20585887 A JP20585887 A JP 20585887A JP S6450350 A JPS6450350 A JP S6450350A
Authority
JP
Japan
Prior art keywords
sample movement
axis
sample
clutch
rotary encoder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62205858A
Other languages
English (en)
Inventor
Yoshihiro Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62205858A priority Critical patent/JPS6450350A/ja
Publication of JPS6450350A publication Critical patent/JPS6450350A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP62205858A 1987-08-19 1987-08-19 Control device for electron microscope Pending JPS6450350A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62205858A JPS6450350A (en) 1987-08-19 1987-08-19 Control device for electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62205858A JPS6450350A (en) 1987-08-19 1987-08-19 Control device for electron microscope

Publications (1)

Publication Number Publication Date
JPS6450350A true JPS6450350A (en) 1989-02-27

Family

ID=16513879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62205858A Pending JPS6450350A (en) 1987-08-19 1987-08-19 Control device for electron microscope

Country Status (1)

Country Link
JP (1) JPS6450350A (ja)

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