JPS6449675U - - Google Patents
Info
- Publication number
- JPS6449675U JPS6449675U JP14459887U JP14459887U JPS6449675U JP S6449675 U JPS6449675 U JP S6449675U JP 14459887 U JP14459887 U JP 14459887U JP 14459887 U JP14459887 U JP 14459887U JP S6449675 U JPS6449675 U JP S6449675U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- processing
- mass flow
- flow controller
- piping system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 6
- 238000010574 gas phase reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14459887U JPS6449675U (ko) | 1987-09-22 | 1987-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14459887U JPS6449675U (ko) | 1987-09-22 | 1987-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6449675U true JPS6449675U (ko) | 1989-03-28 |
Family
ID=31412444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14459887U Pending JPS6449675U (ko) | 1987-09-22 | 1987-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6449675U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01225320A (ja) * | 1988-03-05 | 1989-09-08 | Tadahiro Omi | シリンダーキャビネット配管装置 |
-
1987
- 1987-09-22 JP JP14459887U patent/JPS6449675U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01225320A (ja) * | 1988-03-05 | 1989-09-08 | Tadahiro Omi | シリンダーキャビネット配管装置 |