JPS6447923A - Array type pyroelectric infrared-ray sensor - Google Patents

Array type pyroelectric infrared-ray sensor

Info

Publication number
JPS6447923A
JPS6447923A JP62205673A JP20567387A JPS6447923A JP S6447923 A JPS6447923 A JP S6447923A JP 62205673 A JP62205673 A JP 62205673A JP 20567387 A JP20567387 A JP 20567387A JP S6447923 A JPS6447923 A JP S6447923A
Authority
JP
Japan
Prior art keywords
array type
infrared
parts
infrared rays
pyroelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62205673A
Other languages
Japanese (ja)
Inventor
Kunio Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62205673A priority Critical patent/JPS6447923A/en
Publication of JPS6447923A publication Critical patent/JPS6447923A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors

Abstract

PURPOSE:To make it possible to suppress the decrease in detecting sensitivity of infrared rays, by forming recess parts at a part facing the sensitive parts of pyroelectric elements in an array type infrared-ray condenser lens, and setting the interval between both parts at the wavelength or less of the infrared rays to be observed. CONSTITUTION:An array type infrared-ray semiconductor element 4 is used, and an infrared-ray sensor having e.g., 64X64 elements, is manufactured. At this time 64X64 pieces of recess parts 10 each having a depth of 4mum are formed on the planar side of an array type infrared- ray condenser lens 9 by a chemical etching method. Meanwhile, a common grounding electrode 3 is evaporated on each pyroelectric element 1. The element is stuck to the flat surface of the lens 9 in the direction of B-B. A signal lead-out electrode 2 is formed on the opposite side of the electrode 3 on each pyroelectric element 1. A protruding part 13 is formed on the end part thereof. The pyroelectric element layers such as these are arranged in the direction of A-A by 64 elements. A protruding part 14 is formed on the element 4 at the same pitch as the protruding part 13. Then, the protruding parts 13 and 14 are heated and undergo thermocompression bonding. Since the pyroelectric element 1 and the lens 9 are not in tight contact, total reflection hardly occurs when infrared rays are inputted in the pyroelectric element 1. The infrared rays are efficiently absorbed, and the escape of heat can be prevented.
JP62205673A 1987-08-19 1987-08-19 Array type pyroelectric infrared-ray sensor Pending JPS6447923A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62205673A JPS6447923A (en) 1987-08-19 1987-08-19 Array type pyroelectric infrared-ray sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62205673A JPS6447923A (en) 1987-08-19 1987-08-19 Array type pyroelectric infrared-ray sensor

Publications (1)

Publication Number Publication Date
JPS6447923A true JPS6447923A (en) 1989-02-22

Family

ID=16510798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62205673A Pending JPS6447923A (en) 1987-08-19 1987-08-19 Array type pyroelectric infrared-ray sensor

Country Status (1)

Country Link
JP (1) JPS6447923A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06194136A (en) * 1992-09-17 1994-07-15 Matsushita Electric Ind Co Ltd Thermal image detecting device
WO2000016050A1 (en) * 1998-09-16 2000-03-23 Braun Gmbh Radiation thermometer and radiation sensor with several sensor elements, method for determining temperature

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06194136A (en) * 1992-09-17 1994-07-15 Matsushita Electric Ind Co Ltd Thermal image detecting device
WO2000016050A1 (en) * 1998-09-16 2000-03-23 Braun Gmbh Radiation thermometer and radiation sensor with several sensor elements, method for determining temperature
US6709154B1 (en) 1998-09-16 2004-03-23 Braun Gmbh Radiation thermometer and radiation sensor with several sensor elements, method for determining temperature

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